Inventor · disambiguated record
Haruyoshi Yamakawa
Also filed as: YAMAKAWA HARUYOSHI
5 granted patents·6 pending applications·3 citations·filing 2005–2020
63Inventor score
Top patents by PatentIndex Score
11 records- 0165US10026628B2Semiconductor substrate cleaning method and cleaning systemKURITA WATER IND LTD·Filed 2013·Granted Jul 17, 2018·2 cites·13 claims
- 0251US9593424B2Sulfuric acid recycling type cleaning system and a sulfuric acid recycling type persulfuric acid supply apparatusNAGAI TATSUO·Filed 2005·Granted Mar 14, 2017·1 cites·17 claims
- 0350US9791169B2Liquid heaterUCHIDA MINORU·Filed 2012·Granted Oct 17, 2017·0 cites·7 claims
- 0449US2023079765A1Startup method for electrolytic sulfuric acid solution manufacturing systemKURITA WATER IND LTD·Filed 2020·Application pending·0 cites
- 0541US2023142233A1Etching method for resin molded article and etching process system for resin molded articleKURITA WATER IND LTD·Filed 2020·Application pending·0 cites
- 0640US10032623B2Method and system for cleaning semiconductor substrateOGAWA YUICHI·Filed 2013·Granted Jul 24, 2018·0 cites·5 claims
- 0738US10056248B2Method for measuring overall concentration of oxidizing substances, substrate cleaning method, and substrate cleaning systemKURITA WATER IND LTD·Filed 2014·Granted Aug 21, 2018·0 cites·5 claims
- 0834US2022325421A1Method for inhibiting reduction in concentration of oxidizing agent in sulfuric acid solution containing persulfuric acid componentKURITA WATER IND LTD·Filed 2020·Application pending·0 cites
- 0934US2013092553A1Supply system and supply method for functional solutionYAMAKAWA HARUYOSHI·Filed 2010·Application pending·0 cites
- 1031US2013068260A1Method of cleaning electronic material and cleaning systemYAMAKAWA HARUYOSHI·Filed 2011·Application pending·0 cites
- 1129US2014116464A1Method for cleaning metal gate semiconductorNAGAI TATSUO·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →