Inventor · disambiguated record
Matthias Orth
Also filed as: ORTH MATTHIAS
5 granted patents·1 pending application·11 citations·filing 2011–2015
71Inventor score
Top patents by PatentIndex Score
6 records- 0187US8885143B2Projection exposure apparatus for microlithography for the production of semiconductor componentsFISCHER JUERGEN·Filed 2011·Granted Nov 11, 2014·7 cites·26 claims
- 0276US9341807B2Gravitation compensation for optical elements in projection exposure apparatusesZEISS CARL SMT GMBH·Filed 2014·Granted May 17, 2016·3 cites·32 claims
- 0361US8854603B2Gravitation compensation for optical elements in projection exposure apparatusesMUEHLBERGER NORBERT·Filed 2011·Granted Oct 7, 2014·1 cites·20 claims
- 0458US9513562B2Projection exposure apparatus for microlithography for the production of semiconductor componentsZEISS CARL SMT GMBH·Filed 2014·Granted Dec 6, 2016·0 cites·29 claims
- 0543US10078271B2Optical componentZEISS CARL SMT GMBH·Filed 2014·Granted Sep 18, 2018·0 cites·16 claims
- 0633US2015185469A1Method for regulating the tilting of a mirror elementZEISS CARL SMT GMBH·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →