Inventor · disambiguated record
Shouichi Terada
Also filed as: TERADA SHOUICHI
10 granted patents·1 pending application·505 citations·filing 2004–2010
88Inventor score
Technology areasH10P
Top patents by PatentIndex Score
11 records- 0196US8084372B2Substrate processing method and computer storage mediumYOU GEN·Filed 2008·Granted Dec 27, 2011·464 cites·10 claims
- 0286US7910157B2Substrate processing method and programTOKYO ELECTRON LTD·Filed 2006·Granted Mar 22, 2011·12 cites·15 claims
- 0384US8864933B2Substrate treatment apparatus and substrate treatment methodTERADA SHOUICHI·Filed 2010·Granted Oct 21, 2014·10 cites·17 claims
- 0482US7757626B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2006·Granted Jul 20, 2010·8 cites·11 claims
- 0574US7968468B2Substrate treatment apparatus and substrate treatment methodTOKYO ELECTRON LTD·Filed 2006·Granted Jun 28, 2011·4 cites·8 claims
- 0672US7416474B2Planarization apparatusTOKYO ELECTRON LTD·Filed 2007·Granted Aug 26, 2008·4 cites·14 claims
- 0764US7926444B2Method for forming thin film and film-forming deviceTOKYO ELECTRON LTD·Filed 2006·Granted Apr 19, 2011·2 cites·4 claims
- 0860US7316515B2Liquid processing apparatus processing a substrate surface with a processing liquid, liquid processing method, and liquid condition detection apparatus detecting fluctuation of the processing liquidTOKYO ELECTRON LTD·Filed 2005·Granted Jan 8, 2008·1 cites·16 claims
- 0944US7757625B2Method for forming thin film and film-forming deviceTOKYO ELECTRON LTD·Filed 2006·Granted Jul 20, 2010·0 cites·5 claims
- 1041US8192796B2Substrate processing apparatus and substrate processing methodSHINYA HIROSHI·Filed 2010·Granted Jun 5, 2012·0 cites·11 claims
- 1138US2004197433A1Film removing apparatus, film removing method and substrate processing systemFiled 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →