Inventor · disambiguated record
Tetsuya Oshino
Also filed as: OSHINO TETSUYA
12 granted patents·2 pending applications·325 citations·filing 1995–2010
92Inventor score
Top patents by PatentIndex Score
14 records- 0190US5677939AIlluminating apparatusNIKON CORP·Filed 1995·Granted Oct 14, 1997·108 cites·16 claims
- 0289US6859337B2Optical-element mountings exhibiting reduced deformation of optical elements held therebyNIKON CORP·Filed 2003·Granted Feb 22, 2005·36 cites·13 claims
- 0379US6208707B1X-ray projection exposure apparatusNIKON CORP·Filed 1999·Granted Mar 27, 2001·45 cites·19 claims
- 0477US6240158B1X-ray projection exposure apparatus with a position detection optical systemNIKON CORP·Filed 1999·Granted May 29, 2001·40 cites·29 claims
- 0575US6108096ALight absorption measurement apparatus and methodsNIKON CORP·Filed 1998·Granted Aug 22, 2000·43 cites·38 claims
- 0674US6909774B2Apparatus and methods for surficial milling of selected regions on surfaces of multilayer-film reflective mirrors as used in X-ray optical systemsNIKON CORP·Filed 2002·Granted Jun 21, 2005·13 cites·5 claims
- 0766US6356616B1Apparatus and methods for detecting position of an object along an axisNIKON CORP·Filed 2000·Granted Mar 12, 2002·9 cites·20 claims
- 0863US6878042B2Devices and methods for holding an optical element with reduced stress in an optical column and while performing an out-of-column procedure on the elementNIKON CORP·Filed 2003·Granted Apr 12, 2005·7 cites·20 claims
- 0959US6069937AIllumination apparatusNIKON CORP·Filed 1998·Granted May 30, 2000·20 cites·15 claims
- 1046US6816568B2X-ray projection exposure device, X-ray projection exposure method, and semiconductor deviceNIKON CORP·Filed 2001·Granted Nov 9, 2004·1 cites·11 claims
- 1140US2004051984A1Devices and methods for cooling optical elements in optical systems, including optical systems used in vacuum environmentsNIKON CORP·Filed 2003·Application pending·0 cites
- 1237US2012188526A1Illumination optical apparatus, exposure apparatus, and device manufacturing methodOSHINO TETSUYA·Filed 2010·Application pending·0 cites
- 1335US6376849B1Charged particle beam exposure apparatus mask and charged particle beam exposure apparatusNIKON CORP·Filed 1999·Granted Apr 23, 2002·2 cites·16 claims
- 1431US6218674B1Electron beam projection exposure apparatusNIKON CORP·Filed 1998·Granted Apr 17, 2001·1 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →