Inventor · disambiguated record
Yukiharu Okubo
Also filed as: OKUBO YUKIHARU
18 granted patents·6 pending applications·448 citations·filing 1996–2012
95Inventor score
Top patents by PatentIndex Score
24 records- 0197US7244932B2Electron beam apparatus and device fabrication method using the electron beam apparatusEBARA CORP·Filed 2001·Granted Jul 17, 2007·74 cites·51 claims
- 0296US7439502B2Electron beam apparatus and device production method using the electron beam apparatusEBARA CORP·Filed 2007·Granted Oct 21, 2008·23 cites·7 claims
- 0392US6566658B1Charged particle beam control element, method of fabricating charged particle beam control element, and charged beam apparatusNIKON CORP·Filed 2000·Granted May 20, 2003·32 cites·10 claims
- 0491US7453549B2Reticle protection member, reticle carrying device, exposure device and method for carrying reticleNIKON CORP·Filed 2005·Granted Nov 18, 2008·15 cites·14 claims
- 0590US6583597B2Stage apparatus including non-containing gas bearings and microlithography apparatus comprising sameNIKON CORP·Filed 2001·Granted Jun 24, 2003·32 cites·62 claims
- 0690US5633755AProjection apparatus and methodNIKON CORP·Filed 1996·Granted May 27, 1997·144 cites·14 claims
- 0782US6499880B2Static pressure air bearingNIKON CORP·Filed 2001·Granted Dec 31, 2002·18 cites·15 claims
- 0879US6351041B1Stage apparatus and inspection apparatus having stage apparatusNIKON CORP·Filed 2000·Granted Feb 26, 2002·23 cites·20 claims
- 0977US8168959B2Reticle protection member, reticle carrying device, exposure device and method for carrying reticleSUZUKI MOTOKO·Filed 2008·Granted May 1, 2012·5 cites·30 claims
- 1075US6900878B2Reticle-holding pods and methods for holding thin, circular reticles, and reticle-handling systems utilizing sameNIKON CORP·Filed 2003·Granted May 31, 2005·18 cites·35 claims
- 1172US6670602B1Scanning device and scanning methodNIKON CORP·Filed 1999·Granted Dec 30, 2003·21 cites·11 claims
- 1272US6267131B1Method of controlling pressure in a chamber, apparatus for the same, and exposure apparatusNIKON CORP·Filed 2000·Granted Jul 31, 2001·17 cites·23 claims
- 1371US8921812B2Reticle protection member, reticle carrying device, exposure device and method for carrying reticleSUZUKI MOTOKO·Filed 2012·Granted Dec 30, 2014·2 cites·10 claims
- 1468US6328473B1Static air-bearing and stage apparatus using the bearing and optical apparatus using the stage apparatusNIKON CORP·Filed 2000·Granted Dec 11, 2001·15 cites·19 claims
- 1561US6977377B2Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatusNIKON CORP·Filed 2004·Granted Dec 20, 2005·3 cites·7 claims
- 1660US2008173815A1Electron beam apparatus and device production method using the electron beam apparatusEBARA CORP·Filed 2008·Application pending·0 cites
- 1755US6735867B2Method of making a static pressure air bearingNIKON CORP·Filed 2002·Granted May 18, 2004·5 cites·11 claims
- 1851US6953944B2Scanning device and method including electric charge movementNIKON CORP·Filed 2003·Granted Oct 11, 2005·1 cites·21 claims
- 1945US6781123B2Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatusNIKON CORP·Filed 2003·Granted Aug 24, 2004·0 cites·12 claims
- 2037US2002089657A1Stage devices configured for use in a vacuum environment of a charged-particle-beam microlithography apparatusNIKON CORP·Filed 2001·Application pending·0 cites
- 2136US2002074939A1Charged particle beam apparatusNIKON CORP·Filed 2001·Application pending·0 cites
- 2236US2002158198A1Charged particle beam apparatusNIKON CORP·Filed 2001·Application pending·0 cites
- 2335US2003178579A1Stage devices exhibiting reduced deformation, and microlithography systems comprising sameNIKON CORP·Filed 2003·Application pending·0 cites
- 2434US2002021428A1Charged-particle-beam microlithography stage including actuators for moving a reticle or substrate relative to the stage, and associated methodsFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →