Inventor · disambiguated record
Soon-Im Wi
Also filed as: WI SOON IM
8 granted patents·1 pending application·88 citations·filing 2004–2022
86Inventor score
Top patents by PatentIndex Score
9 records- 0194US7952048B2Plasma source with discharge inducing bridge and plasma processing system using the sameNEW POWER PLASMA CO LTD·Filed 2006·Granted May 31, 2011·32 cites·22 claims
- 0290US8018163B2Capacitively coupled plasma reactorNEW POWER PLASMA CO LTD·Filed 2008·Granted Sep 13, 2011·18 cites·40 claims
- 0389US12183545B2Plasma reactorNEW POWER PLASMA CO LTD·Filed 2022·Granted Dec 31, 2024·2 cites·9 claims
- 0483US7285916B2Multi chamber plasma process systemNEW POWER PLASMA CO LTD·Filed 2005·Granted Oct 23, 2007·9 cites·19 claims
- 0582US9054146B2Substrate transfer equipment and high speed substrate processing system using the sameWI SOON-IM·Filed 2007·Granted Jun 9, 2015·11 cites·31 claims
- 0680US9773645B2Remote plasma generator using ceramicSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Sep 26, 2017·4 cites·16 claims
- 0769US8409400B2Inductive plasma chamber having multi discharge tube bridgeWI SOON-IM·Filed 2004·Granted Apr 2, 2013·10 cites·12 claims
- 0857US7477022B2System and method for driving a multi-lampNEW POWER PLASMA CO LTD·Filed 2006·Granted Jan 13, 2009·2 cites·21 claims
- 0946US2010193132A1Multi-workpiece processing chamber and workpiece processing system including the sameNEW POWER PLASAMA CO LTD·Filed 2009·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →