Inventor · disambiguated record
Noel Sun
Also filed as: SUN NOEL · SUN NOEL YUI
6 granted patents·1 pending application·37 citations·filing 2009–2018
81Inventor score
Top patents by PatentIndex Score
7 records- 0191US9230819B2Internal plasma grid applications for semiconductor fabrication in context of ion-ion plasma processingLAM RES CORP·Filed 2014·Granted Jan 5, 2016·15 cites·30 claims
- 0290US9633846B2Internal plasma grid applications for semiconductor fabricationLAM RES CORP·Filed 2015·Granted Apr 25, 2017·8 cites·23 claims
- 0380US10515815B2Atomic layer deposition and etch in a single plasma chamber for fin field effect transistor formationLAM RES CORP·Filed 2017·Granted Dec 24, 2019·4 cites·17 claims
- 0475US9972502B2Systems and methods for performing in-situ deposition of sidewall image transfer spacersLAM RES CORP·Filed 2015·Granted May 15, 2018·2 cites·9 claims
- 0566US8101525B2Method for fabricating a semiconductor device having a lanthanum-family-based oxide layerSHEN MEIHUA·Filed 2009·Granted Jan 24, 2012·4 cites·21 claims
- 0659US9533332B2Methods for in-situ chamber clean utilized in an etching processing chamberSUN NOEL·Filed 2012·Granted Jan 3, 2017·4 cites·14 claims
- 0749US2018247828A1Systems for performing in-situ deposition of sidewall image transfer spacersLAM RES CORP·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →