Inventor · disambiguated record
Paul Shufflebotham
Also filed as: SHUFFLEBOTHAM PAUL · SHUFFLEBOTHAM PAUL K · SHUFFLEBOTHAM PAUL KEVIN
21 granted patents·7 pending applications·1,489 citations·filing 1995–2016
96Inventor score
Files withLAM RES CORP10SHUFFLEBOTHAM PAUL8NOVELLUS SYSTEMS INC2BEIJING APOLLO DING RONG SOLAR TECH CO LTD1BEIJING APOLLO DING RONG SOLAR TECHNOLOGY CO LTD1
Top patents by PatentIndex Score
28 records- 0198US6106678AMethod of high density plasma CVD gap-fillingLAM RES CORP·Filed 1998·Granted Aug 22, 2000·635 cites·16 claims
- 0294US6184158B1Inductively coupled plasma CVDLAM RES CORP·Filed 1996·Granted Feb 6, 2001·193 cites·60 claims
- 0393US8656658B2Retainers for attaching photovoltaic modules to mounting structuresSHUFFLEBOTHAM PAUL·Filed 2010·Granted Feb 25, 2014·16 cites·30 claims
- 0492US8048707B1Sulfur salt containing CIG targets, methods of making and methods of use thereofMIASOLE·Filed 2010·Granted Nov 1, 2011·10 cites·30 claims
- 0592US5838529ALow voltage electrostatic clamp for substrates such as dielectric substratesLAM RES CORP·Filed 1995·Granted Nov 17, 1998·125 cites·29 claims
- 0690US9303316B1Continuous web apparatus and method using an air to vacuum seal and accumulatorSHUFFLEBOTHAM PAUL·Filed 2011·Granted Apr 5, 2016·19 cites·13 claims
- 0787US5805408AElectrostatic clamp with lip seal for clamping substratesLAM RES CORP·Filed 1995·Granted Sep 8, 1998·86 cites·32 claims
- 0886US6888040B1Method and apparatus for abatement of reaction products from a vacuum processing chamberLAM RES CORP·Filed 1996·Granted May 3, 2005·64 cites·29 claims
- 0986US6468384B1Predictive wafer temperature control system and methodNOVELLUS SYSTEMS INC·Filed 2000·Granted Oct 22, 2002·50 cites·33 claims
- 1083US5503676AApparatus and method for magnetron in-situ cleaning of plasma reaction chamberLAM RES CORP·Filed 1995·Granted Apr 2, 1996·81 cites·24 claims
- 1181US5669977AShape memory alloy lift pins for semiconductor processing equipmentLAM RES CORP·Filed 1995·Granted Sep 23, 1997·66 cites·25 claims
- 1279US8956888B2Photovoltaic device and method and system for making photovoltaic deviceSHUFFLEBOTHAM PAUL·Filed 2010·Granted Feb 17, 2015·2 cites·17 claims
- 1379US5711998AMethod of polycrystalline silicon hydrogenationLAM RES CORP·Filed 1996·Granted Jan 27, 1998·56 cites·38 claims
- 1477US8710350B2Combination photovoltaic and wind power generation installationSHUFFLEBOTHAM PAUL·Filed 2011·Granted Apr 29, 2014·3 cites·2 claims
- 1573US9169548B1Photovoltaic cell with copper poor CIGS absorber layer and method of making thereofCORSON JOHN·Filed 2010·Granted Oct 27, 2015·4 cites·15 claims
- 1672US9512516B1Cooling water jet pack for high power rotary cathodesMARTINSON ROBERT·Filed 2010·Granted Dec 6, 2016·3 cites·15 claims
- 1767US6626185B2Method of depositing a silicon containing layer on a semiconductor substrateLAM RES CORP·Filed 1999·Granted Sep 30, 2003·21 cites·17 claims
- 1866US5847918AElectrostatic clamping method and apparatus for dielectric workpieces in vacuum processorsLAM RES CORP·Filed 1995·Granted Dec 8, 1998·32 cites·37 claims
- 1956US10262843B2Cooling water jet pack for high power rotary cathodesBEIJING APOLLO DING RONG SOLAR TECH CO LTD·Filed 2016·Granted Apr 16, 2019·0 cites·30 claims
- 2053US2013048488A1Impermeable PVD Target Coating for Porous Target MaterialsSHUFFLEBOTHAM PAUL·Filed 2011·Application pending·0 cites
- 2152US6086246ATwo-element plasma resistant lightpipe assemblyNOVELLUS SYSTEMS INC·Filed 1998·Granted Jul 11, 2000·20 cites·32 claims
- 2249US2011308563A1Flexible photovoltaic modules in a continuous rollSHUFFLEBOTHAM PAUL·Filed 2010·Application pending·0 cites
- 2348US8664560B2Method and apparatus for abatement of reaction products from a vacuum processing chamberSHUFFLEBOTHAM PAUL KEVIN·Filed 2004·Granted Mar 4, 2014·3 cites·22 claims
- 2447US2010258173A1Polishing a thin metallic substrate for a solar cellLAIA JOSEPH·Filed 2009·Application pending·0 cites
- 2542US2016190383A1Continuous web apparatus and method using an air to vacuum seal and accumulatorBEIJING APOLLO DING RONG SOLAR TECHNOLOGY CO LTD·Filed 2016·Application pending·0 cites
- 2638US2001019903A1Inductively coupled plasma CVDFiled 2001·Application pending·0 cites
- 2736US2012090671A1Modified band gap window layer for a cigs absorber containing photovoltaic cell and method of making thereofSHUFFLEBOTHAM PAUL·Filed 2010·Application pending·0 cites
- 2835US2011308562A1Photovoltaic module electrical connectorsSHUFFLEBOTHAM PAUL·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →