Inventor · disambiguated record
Robertus Nicodemus Jacobus Van Ballegoij
Also filed as: VAN BALLEGOIJ ROBERTUS NICODEM · VAN BALLEGOIJ ROBERTUS NICODEMUS JACOBUS
9 granted patents·66 citations·filing 2001–2015
85Inventor score
Top patents by PatentIndex Score
9 records- 0187US6473161B2Lithographic projection apparatus, supporting assembly and device manufacturing methodASML NETHERLANDS BV·Filed 2001·Granted Oct 29, 2002·33 cites·12 claims
- 0285US6906786B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jun 14, 2005·23 cites·27 claims
- 0377US9213246B2Fluid extraction system, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Dec 15, 2015·2 cites·20 claims
- 0474US8654309B2Fluid extraction system, lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2009·Granted Feb 18, 2014·3 cites·20 claims
- 0566US10139735B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2015·Granted Nov 27, 2018·1 cites·24 claims
- 0659US7072025B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jul 4, 2006·1 cites·24 claims
- 0749US7361911B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 22, 2008·2 cites·22 claims
- 0845US7030967B2Lithographic apparatus, device manufacturing method and substrate holderASML NETHERLANDS BV·Filed 2003·Granted Apr 18, 2006·1 cites·21 claims
- 0943US10031428B2Gas flow optimization in reticle stage environmentASML NETHERLANDS BV·Filed 2014·Granted Jul 24, 2018·0 cites·38 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →