Inventor · disambiguated record
Hyug-Gyo Rhee
Also filed as: RHEE HYUG-GYO
11 granted patents·6 citations·filing 2010–2023
80Inventor score
Files withKOREA RES INST STANDARDS & SCI6KOREA RES INSTITUTE OF STANDARD AND SCIENCE2RHEE HYUG-GYO2KOREAN RES INSTITUTE OF STANDARD AND SCIENCE1
Top patents by PatentIndex Score
11 records- 0172US11906281B2Device and method for measuring thickness and refractive index of multilayer thin film by using angle-resolved spectral reflectometryKOREA RES INST STANDARDS & SCI·Filed 2018·Granted Feb 20, 2024·2 cites·2 claims
- 0266US9223223B2Apparatus for forming fine patterns capable of switching direction of polarization interference pattern in laser scanning method and method of forming fine patterns using the sameRHEE HYUG-GYO·Filed 2010·Granted Dec 29, 2015·2 cites·9 claims
- 0365US11466978B2Apparatus and method for measuring the thickness and refractive index of multilayer thin films using angle-resolved spectral interference image according to polarizationKOREA RES INSTITUTE OF STANDARD AND SCIENCE·Filed 2019·Granted Oct 11, 2022·1 cites·13 claims
- 0455US12474165B2Calibration method for deflectometry method, for improving measurement accuracyKOREA RES INSTITUTE OF STANDARD AND SCIENCE·Filed 2023·Granted Nov 18, 2025·0 cites·16 claims
- 0555US9863814B2Correction of rotational inaccuracy in lateral shearing interferometryKOREA RES INST STANDARDS & SCI·Filed 2014·Granted Jan 9, 2018·1 cites·9 claims
- 0647US11243070B2Apparatus and method for multilayer thin film thickness measurement using single-shot angle-resolved spectral reflectometryKOREA RES INST STANDARDS & SCI·Filed 2020·Granted Feb 8, 2022·0 cites·7 claims
- 0742US11486700B2System and method for 3D shape measurement of freeform surface based on high-speed deflectometry using composite patternsKOREA RES INST STANDARDS & SCI·Filed 2019·Granted Nov 1, 2022·0 cites·16 claims
- 0842US11255662B2System and method for compensating for non-linear response characteristic in phase-shifting deflectometryKOREA RES INST STANDARDS & SCI·Filed 2018·Granted Feb 22, 2022·0 cites·6 claims
- 0939US10466031B2Apparatus for measuring thickness and surface profile of multilayered film structure using imaging spectral optical system and measuring methodKOREA RES INST STANDARDS & SCI·Filed 2016·Granted Nov 5, 2019·0 cites·15 claims
- 1036US9707714B2Apparatus and method for manufacturing fine pattern using interferogram of optical axis directionRHEE HYUG-GYO·Filed 2012·Granted Jul 18, 2017·0 cites·5 claims
- 1129US12326402B2Vibration insensitive interferometry for measuring thickness and profile of multilayer thin-filmKOREAN RES INSTITUTE OF STANDARD AND SCIENCE·Filed 2020·Granted Jun 10, 2025·0 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →