Inventor · disambiguated record
Zenichi Hamaya
Also filed as: HAMAYA ZENICHI
8 granted patents·2 pending applications·27 citations·filing 2007–2020
81Inventor score
Top patents by PatentIndex Score
10 records- 0191US10095117B2Imprint apparatusCANON KK·Filed 2016·Granted Oct 9, 2018·4 cites·18 claims
- 0291US9804510B2Interferometer system, lithography apparatus, and article manufacturing methodCANON KK·Filed 2014·Granted Oct 31, 2017·12 cites·14 claims
- 0387US9285675B2Imprint apparatusHAMAYA ZENICHI·Filed 2012·Granted Mar 15, 2016·6 cites·16 claims
- 0483US9400426B2Imprint apparatusHAMAYA ZENICHI·Filed 2012·Granted Jul 26, 2016·5 cites·9 claims
- 0550US9217937B2Interferometric measurement of rotation of stage apparatus and adjustment method thereof, exposure apparatus and method of manufacturing deviceCANON KK·Filed 2013·Granted Dec 22, 2015·0 cites·15 claims
- 0650US7646488B2Positioning apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2007·Granted Jan 12, 2010·0 cites·15 claims
- 0749US11747722B2Imprint method, imprint apparatus, and method of manufacturing articleCANON KK·Filed 2020·Granted Sep 5, 2023·0 cites·18 claims
- 0849US11314167B2Imprint apparatus, imprint method, and method for manufacturing articleCANON KK·Filed 2019·Granted Apr 26, 2022·0 cites·14 claims
- 0945US2010068659A1Exposure apparatus and device manufacturing methodCANON KK·Filed 2009·Application pending·0 cites
- 1037US2017210036A1Mold replicating method, imprint apparatus, and article manufacturing methodCANON KK·Filed 2017·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Zenichi Hamaya files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →