Inventor · disambiguated record
Robert J. Champetier
Also filed as: CHAMPETIER ROBERT · CHAMPETIER ROBERT J
13 granted patents·2 pending applications·658 citations·filing 1986–2014
94Inventor score
Top patents by PatentIndex Score
15 records- 0191US6056434AApparatus and method for determining the temperature of objects in thermal processing chambersSTEAG RTP SYSTEMS INC·Filed 1998·Granted May 2, 2000·123 cites·27 claims
- 0288US7080940B2In situ optical surface temperature measuring techniques and devicesLUXTRON CORP·Filed 2004·Granted Jul 25, 2006·37 cites·16 claims
- 0388US5960158AApparatus and method for filtering light in a thermal processing chamberASSOCIATES AG·Filed 1997·Granted Sep 28, 1999·117 cites·30 claims
- 0486US6027244AApparatus for determining the temperature of a semi-transparent radiating bodySTEAG RTP SYSTEMS INC·Filed 1997·Granted Feb 22, 2000·94 cites·28 claims
- 0585US5997175AMethod for determining the temperature of a semi-transparent radiating bodySTEAG RTP SYSTEMS INC·Filed 1999·Granted Dec 7, 1999·84 cites·8 claims
- 0684US7374335B2In situ optical surface temperature measuring techniques and devicesLUXTRON CORP·Filed 2006·Granted May 20, 2008·12 cites·27 claims
- 0782US5874711AApparatus and method for determining the temperature of a radiating surfaceASSOCIATES AG·Filed 1997·Granted Feb 23, 1999·87 cites·29 claims
- 0882US4808813ASelf contained surface contamination sensor for detecting external particulates and surface discontinuitiesHUGHES AIRCRAFT CO·Filed 1986·Granted Feb 28, 1989·48 cites·15 claims
- 0970US9551569B2Apparatus and method for curvature and thin film stress measurementHERMES-EPITEK CORP·Filed 2014·Granted Jan 24, 2017·3 cites·15 claims
- 1059US4846425AMethod and apparatus for atomic beam irradiationHUGHES AIRCRAFT CO·Filed 1988·Granted Jul 11, 1989·16 cites·8 claims
- 1155US4917499AApparatus for analyzing contaminationHUGHES AIRCRAFT CO·Filed 1986·Granted Apr 17, 1990·21 cites·13 claims
- 1246US5196901ADiscriminating surface contamination monitorEOS TECHNOLOGIES INC·Filed 1991·Granted Mar 23, 1993·13 cites·5 claims
- 1346US2008225926A1In situ optical surface temperature measuring techniques and devicesLUXTRON CORP·Filed 2008·Application pending·0 cites
- 1438US2007076780A1Devices, systems and methods for determining temperature and/or optical characteristics of a substrateCHAMPETIER ROBERT J·Filed 2005·Application pending·0 cites
- 1530US4861445ABarrier for molecular contaminatesHUGHES AIRCRAFT CO·Filed 1987·Granted Aug 29, 1989·3 cites·12 claims
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