Inventor · disambiguated record
Klaus Breitschwerdt
Also filed as: BREITSCHWERDT KLAUS
12 granted patents·3 pending applications·79 citations·filing 1999–2014
90Inventor score
Files withBOSCH GMBH ROBERT9MTU MUENCHEN GMBH2BREITSCHWERDT KLAUS1FRIEDRICH CHRISTIAN1MAN ENERGY SOLUTIONS SE1
Top patents by PatentIndex Score
15 records- 0169US7285228B2Device and method for anisotropic plasma etching of a substrate, a silicon body in particularBOSCH GMBH ROBERT·Filed 2003·Granted Oct 23, 2007·14 cites·17 claims
- 0267US7149070B2Holding device, in particular for fixing a semiconductor wafer in a plasma etching device, and method for supplying heat to or dissipating heat from a substrateBOSCH GMBH ROBERT·Filed 2002·Granted Dec 12, 2006·11 cites·21 claims
- 0366US6974709B2Method and device for providing a semiconductor etching end point and for detecting the end pointBOSCH GMBH ROBERT·Filed 2003·Granted Dec 13, 2005·10 cites·13 claims
- 0460US7785486B2Method of etching structures into an etching body using a plasmaBOSCH GMBH ROBERT·Filed 2003·Granted Aug 31, 2010·7 cites·20 claims
- 0551US7642545B2Layer and system with a silicon layer and a passivation layer, method for production of a passivation layer on a silicon layer and use thereofBOSCH GMBH ROBERT·Filed 2003·Granted Jan 5, 2010·3 cites·4 claims
- 0651US7288485B2Device and method for anisotropic plasma etching of a substrate, particularly a silicon elementBOSCH GMBH ROBERT·Filed 2003·Granted Oct 30, 2007·4 cites·2 claims
- 0751US6663784B1Method for producing three-dimensional structures by means of an etching processBOSCH GMBH ROBERT·Filed 2000·Granted Dec 16, 2003·6 cites·20 claims
- 0850US6119339ANozzle ring for a gas turbine and method of manufacture thereofMTU MUENCHEN GMBH·Filed 1999·Granted Sep 19, 2000·12 cites·18 claims
- 0949US6709546B2Device and method for etching a substrate by using an inductively coupled plasmaBOSCH GMBH ROBERT·Filed 2001·Granted Mar 23, 2004·2 cites·12 claims
- 1048US6431830B1Nozzle ring for a gas turbineMTU MUENCHEN GMBH·Filed 2000·Granted Aug 13, 2002·10 cites·6 claims
- 1142US7094706B2Device and method for etching a substrate by using an inductively coupled plasmaBOSCH GMBH ROBERT·Filed 2004·Granted Aug 22, 2006·0 cites·10 claims
- 1239US11396891B2CompressorMAN ENERGY SOLUTIONS SE·Filed 2014·Granted Jul 26, 2022·0 cites·10 claims
- 1337US2009169372A1Method of producing a protective coating, protective coating, and component with a protective coatingFRIEDRICH CHRISTIAN·Filed 2006·Application pending·0 cites
- 1435US2006097388A1Electrical system, especially a microelectronic or microelectromechanical high frequency systemBREITSCHWERDT KLAUS·Filed 2003·Application pending·0 cites
- 1534US2004084398A1Module, especially a wafer moduleFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →