Inventor · disambiguated record
Misako Saito
Also filed as: SAITO MISAKO
15 granted patents·8 pending applications·161 citations·filing 1997–2016
92Inventor score
Top patents by PatentIndex Score
23 records- 0197US6903264B2Electric wire coated with polyvinyl chloride resin composition and cableHITACHI CABLE·Filed 2002·Granted Jun 7, 2005·76 cites·21 claims
- 0290US7993458B2Vacuum processing apparatus and methodTOKYO ELECTRON LTD·Filed 2008·Granted Aug 9, 2011·17 cites·8 claims
- 0388US9960056B2Substrate cleaning method, substrate cleaning apparatus and vacuum processing systemTOKYO ELECTRON LTD·Filed 2013·Granted May 1, 2018·10 cites·15 claims
- 0486US7420118B2Electric wire and cable with coating/covering of polyvinyl chloride family resin compositionTOKYO ELECTRON LTD·Filed 2005·Granted Sep 2, 2008·5 cites·24 claims
- 0577US9881815B2Substrate cleaning method, substrate cleaning device, and vacuum processing deviceTOKYO ELECTRON LTD·Filed 2013·Granted Jan 30, 2018·4 cites·8 claims
- 0673US8040504B2Defect inspecting method and defect inspecting apparatusTOKYO ELECTRON LTD·Filed 2007·Granted Oct 18, 2011·4 cites·10 claims
- 0773US7208428B2Method and apparatus for treating article to be treatedTOKYO ELECTRON LTD·Filed 2001·Granted Apr 24, 2007·17 cites·7 claims
- 0868US6537347B2Method for deciding on the timing of replacing a chemical filter, filter life detection sensor, chemical filter unit, and semiconductor manufacturing apparatusOMRON TATEISI ELECTRONICS CO·Filed 2002·Granted Mar 25, 2003·16 cites·8 claims
- 0964US7946152B2Apparatus and method for measuring the concentration of organic gasTOKYO ELECTRON LTD·Filed 2006·Granted May 24, 2011·1 cites·8 claims
- 1052US8911955B2Virus detection device and virus detection methodTOKYO ELECTRON LTD·Filed 2013·Granted Dec 16, 2014·0 cites·5 claims
- 1147US2009206253A1Substrate inspection method, substrate inspection apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 1247US2013209666A1Evaporating apparatus and evaporating methodKAMADA TOMIKO·Filed 2011·Application pending·0 cites
- 1345US2014299870A1Organic transistor and method for manufacturing sameTOKYO ELECTRON LTD·Filed 2012·Application pending·0 cites
- 1444US2009206255A1Substrate inspection device and substrate inspection methodTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 1544US2012031339A1Deposition head and film forming apparatusONO YUJI·Filed 2010·Application pending·0 cites
- 1641US8268185B2Method for analyzing quartz memberDOBASHI KAZUYA·Filed 2007·Granted Sep 18, 2012·0 cites·8 claims
- 1741US2006174835A1Vacuum processing apparatus and method of using the sameSAITO MISAKO·Filed 2006·Application pending·0 cites
- 1841US2012094014A1Vapor deposition apparatus and vapor deposition methodONO YUJI·Filed 2010·Application pending·0 cites
- 1935US6337365B1Electronic/electric components used in clean room and substrate treatment apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Jan 8, 2002·5 cites·14 claims
- 2034US6403498B1Method and device for treating substrateTOKYO ELECTRON LTD·Filed 1998·Granted Jun 11, 2002·4 cites·23 claims
- 2131US9875915B2Method for removing metal contamination and apparatus for removing metal contaminationTOKYO ELECTRON LTD·Filed 2015·Granted Jan 23, 2018·0 cites·22 claims
- 2231US6077894AInstrument and mounting equipment used in clean roomTOKYO ELECTRON LTD·Filed 1997·Granted Jun 20, 2000·2 cites·23 claims
- 2329US2017032984A1Liquid processing method and liquid processing apparatusTOKYO ELECTRON LTD·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →