Inventor · disambiguated record
Stanley Stokowski
Also filed as: STOKOWSKI STANLEY · STOKOWSKI STANLEY E
41 granted patents·11 pending applications·1,813 citations·filing 1976–2015
98Inventor score
Top patents by PatentIndex Score
52 records- 0199US6201601B1Sample inspection systemKLA TENCOR CORP·Filed 1997·Granted Mar 13, 2001·359 cites·51 claims
- 0298US5883710AScanning system for inspecting anomalies on surfacesKLA TENCOR CORP·Filed 1995·Granted Mar 16, 1999·209 cites·46 claims
- 0397US6639662B2Sample inspection systemKLA TENCOR CORP·Filed 2000·Granted Oct 28, 2003·85 cites·29 claims
- 0497US6608676B1System for detecting anomalies and/or features of a surfaceKLA TENCOR CORP·Filed 1997·Granted Aug 19, 2003·159 cites·62 claims
- 0597US6215551B1Scanning system for inspecting anomalies on surfacesKLA TENCOR CORP·Filed 1998·Granted Apr 10, 2001·151 cites·38 claims
- 0696US6384910B2Sample inspection systemKLA TENCOR CORP·Filed 2000·Granted May 7, 2002·57 cites·17 claims
- 0795US8711346B2Inspection systems and methods for detecting defects on extreme ultraviolet mask blanksSTOKOWSKI STANLEY E·Filed 2010·Granted Apr 29, 2014·34 cites·37 claims
- 0895US7297453B2Systems and methods for mitigating variances on a patterned wafer using a prediction modelKLA TENCOR TECH CORP·Filed 2006·Granted Nov 20, 2007·25 cites·15 claims
- 0995US5076692AParticle detection on a patterned or bare wafer surfaceTENCOR INSTRUMENTS·Filed 1990·Granted Dec 31, 1991·157 cites·24 claims
- 1094US8785082B2Method and apparatus for inspecting a reflective lithographic mask blank and improving mask qualityXIONG YALIN·Filed 2012·Granted Jul 22, 2014·16 cites·24 claims
- 1194US7564545B2Inspection methods and systems for lithographic masksKLA TENCOR TECH CORP·Filed 2007·Granted Jul 21, 2009·21 cites·23 claims
- 1293US7303842B2Systems and methods for modifying a reticle's optical propertiesKLA TENCOR TECH CORP·Filed 2006·Granted Dec 4, 2007·20 cites·39 claims
- 1392US7088443B2System for detecting anomalies and/or features of a surfaceKLA TENCOR TECH CORP·Filed 2003·Granted Aug 8, 2006·43 cites·51 claims
- 1491US9645097B2In-line wafer edge inspection, wafer pre-alignment, and wafer cleaningKLA TENCOR CORP·Filed 2015·Granted May 9, 2017·10 cites·21 claims
- 1591US8953869B2Apparatus and methods for inspecting extreme ultra violet reticlesKLA TENCOR CORP·Filed 2013·Granted Feb 10, 2015·13 cites·22 claims
- 1691US6657715B2Sample inspection systemKLA TENCOR CORP·Filed 2000·Granted Dec 2, 2003·26 cites·39 claims
- 1791US6618134B2Sample inspection systemKLA TENCOR CORP·Filed 2001·Granted Sep 9, 2003·27 cites·11 claims
- 1890US5241366AThin film thickness monitorTENCOR INSTRUMENTS·Filed 1992·Granted Aug 31, 1993·79 cites·38 claims
- 1990US4824598ASynthetic laser mediumUS ENERGY·Filed 1987·Granted Apr 25, 1989·47 cites·8 claims
- 2089US6636302B2Scanning system for inspecting anamolies on surfacesKLA TENCOR CORP·Filed 2001·Granted Oct 21, 2003·26 cites·47 claims
- 2187US6674522B2Efficient phase defect detection system and methodKLA TENCOR TECH CORP·Filed 2001·Granted Jan 6, 2004·31 cites·88 claims
- 2286US7218392B2Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illuminationKLA TENCOR TECH CORP·Filed 2005·Granted May 15, 2007·11 cites·12 claims
- 2385US6956644B2Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illuminationKLA TENCOR TECH CORP·Filed 2001·Granted Oct 18, 2005·34 cites·75 claims
- 2484US7079238B2Sample inspection systemKLA TENCOR TECH CORP·Filed 2003·Granted Jul 18, 2006·13 cites·34 claims
- 2583US7119897B2Sample inspection systemKLA TENCOR TECH CORP·Filed 2004·Granted Oct 10, 2006·18 cites·31 claims
- 2681US7084967B2Scanning system for inspecting anomalies on surfacesKLA TENCOR CORP·Filed 2004·Granted Aug 1, 2006·13 cites·49 claims
- 2778US7064821B2Sample inspection systemKLA TENCOR TECH CORP·Filed 2003·Granted Jun 20, 2006·8 cites·11 claims
- 2874US9886764B2Image acquisition system, image acquisition method, and inspection systemKLA TENCOR CORP·Filed 2015·Granted Feb 6, 2018·2 cites·35 claims
- 2970US7869023B2System for detecting anomalies and/or features of a surfaceKLA TENCOR CORP·Filed 2008·Granted Jan 11, 2011·1 cites·2 claims
- 3069US7319229B2Illumination apparatus and methodsKLA TENCOR TECH CORP·Filed 2004·Granted Jan 15, 2008·11 cites·43 claims
- 3169US6891611B1Sample inspection systemKLA TENCOR CORP·Filed 1998·Granted May 10, 2005·17 cites·4 claims
- 3267US4998019APhotoemission contaminant detectorTENCOR INSTRUMENTS·Filed 1989·Granted Mar 5, 1991·21 cites·36 claims
- 3367US4060729APyroelectric detector with decreased susceptibility to vibrational noiseMARTIN MARIETTA CORP·Filed 1976·Granted Nov 29, 1977·26 cites·18 claims
- 3464US6577389B2System and methods for inspection of transparent mask substratesKLA TENCOR TECH CORP·Filed 2001·Granted Jun 10, 2003·5 cites·47 claims
- 3559US7280199B2System for detecting anomalies and/or features of a surfaceKLA TENCOR CORP·Filed 2004·Granted Oct 9, 2007·1 cites·17 claims
- 3659US4661284ASilica and boron-containing ultraphosphate laser glass with low concentration quenching and improved thermal shock resistanceUS ENERGY·Filed 1985·Granted Apr 28, 1987·17 cites·20 claims
- 3758US2008002193A1System for detecting anomalies and/or features of a surfaceZHAO GUOHENG·Filed 2007·Application pending·0 cites
- 3854US7300729B2Method for monitoring a reticleKLA TENCOR TECH CORP·Filed 2006·Granted Nov 27, 2007·4 cites·14 claims
- 3954US2005206886A1Sample inspection systemVAEZ-IRAVANI MEHDI·Filed 2005·Application pending·0 cites
- 4054US2005110986A1Scanning system for inspecting anamolies on surfacesFiled 2004·Application pending·0 cites
- 4153US2006256327A1System for Detecting Anomalies and/or Features of a SurfaceKLA TENCOR TECH CORP·Filed 2006·Application pending·0 cites
- 4252US2008218747A1Method and Apparatus for Detecting Surface Characteristics on a Mask BlankSTOKOWSKI STANLEY E·Filed 2008·Application pending·0 cites
- 4352US2004036864A1System for detecting anomalies and/or features of a surfaceFiled 2003·Application pending·0 cites
- 4452US2004057044A1Scanning system for inspecting anamolies on surfacesFiled 2003·Application pending·0 cites
- 4551US7300725B2Method for determining and correcting reticle variationsKLA TENCOR TECH CORP·Filed 2006·Granted Nov 27, 2007·3 cites·13 claims
- 4650US2004057045A1Sample inspection systemFiled 2003·Application pending·0 cites
- 4749US9679372B2Apparatus and methods for inspecting extreme ultra violet reticlesKLA TENCOR CORP·Filed 2015·Granted Jun 13, 2017·0 cites·20 claims
- 4848US2002097393A1Scanning system for inspecting anamolies on surfacesFiled 2001·Application pending·0 cites
- 4946US2005254065A1Method and apparatus for detecting surface characteristics on a mask blankSTOKOWSKI STANLEY E·Filed 2005·Application pending·0 cites
- 5045US9619878B2Inspecting high-resolution photolithography masksKLA TENCOR CORP·Filed 2014·Granted Apr 11, 2017·0 cites·20 claims
Showing the top 50 of 52 patent records by PatentIndex Score.
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