Inventor · disambiguated record
Robert N. Jacques
Also filed as: JACQUES ROBERT · JACQUES ROBERT N
32 granted patents·4 pending applications·800 citations·filing 2000–2021
97Inventor score
Files withCYMER INC30ACTIVE CONTROL EXPERTS INC1ASML NETHERLANDS BV1DELPHI TECH INC1DUNSTAN WAYNE J1
Top patents by PatentIndex Score
36 records- 0198US6690704B2Control system for a two chamber gas discharge laserCYMER INC·Filed 2002·Granted Feb 10, 2004·128 cites·38 claims
- 0297US6853653B2Laser spectral engineering for lithographic processCYMER INC·Filed 2001·Granted Feb 8, 2005·74 cites·32 claims
- 0396US7164144B2EUV light sourceCYMER INC·Filed 2004·Granted Jan 16, 2007·113 cites·49 claims
- 0496US7087914B2High repetition rate laser produced plasma EUV light sourceCYMER INC·Filed 2004·Granted Aug 8, 2006·109 cites·42 claims
- 0596US6532247B2Laser wavelength control unit with piezoelectric driverCYMER INC·Filed 2001·Granted Mar 11, 2003·79 cites·17 claims
- 0694US7079564B2Control system for a two chamber gas discharge laserCYMER INC·Filed 2005·Granted Jul 18, 2006·26 cites·108 claims
- 0793US7822084B2Method and apparatus for stabilizing and tuning the bandwidth of laser lightCYMER INC·Filed 2008·Granted Oct 26, 2010·17 cites·32 claims
- 0891US7830934B2Multi-chamber gas discharge laser bandwidth control through discharge timingCYMER INC·Filed 2005·Granted Nov 9, 2010·13 cites·33 claims
- 0989US7039086B2Control system for a two chamber gas discharge laserCYMER INC·Filed 2003·Granted May 2, 2006·32 cites·68 claims
- 1087US7835414B2Laser gas injection systemCYMER INC·Filed 2007·Granted Nov 16, 2010·13 cites·10 claims
- 1182US6650666B2Laser wavelength control unit with piezoelectric driverCYMER INC·Filed 2001·Granted Nov 18, 2003·19 cites·13 claims
- 1281US7382815B2Laser spectral engineering for lithographic processCYMER INC·Filed 2004·Granted Jun 3, 2008·14 cites·196 claims
- 1380US7643528B2Immersion lithography laser light source with pulse stretcherCYMER INC·Filed 2007·Granted Jan 5, 2010·6 cites·11 claims
- 1479US8102889B2Multi-chamber gas discharge laser bandwidth control through discharge timingJACQUES ROBERT N·Filed 2010·Granted Jan 24, 2012·5 cites·18 claims
- 1579USRE42588EControl system for a two chamber gas discharge laser systemCYMER INC·Filed 2006·Granted Aug 2, 2011·5 cites·38 claims
- 1679US7596164B2Control system for a two chamber gas discharge laserCYMER INC·Filed 2006·Granted Sep 29, 2009·5 cites·7 claims
- 1779US6598322B2Shoe with quick tightening upperCYMER INC·Filed 2002·Granted Jul 29, 2003·45 cites·12 claims
- 1878US8098698B2Active spectral control of DUV laser light sourceDUNSTAN WAYNE J·Filed 2010·Granted Jan 17, 2012·5 cites·15 claims
- 1975US7158840B2Tuning control parameters of vibration reduction and motion control systems for fabrication equipment and robotic systemsCYMER INC·Filed 2001·Granted Jan 2, 2007·20 cites·66 claims
- 2074US7741639B2Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection controlCYMER INC·Filed 2004·Granted Jun 22, 2010·12 cites·288 claims
- 2171US7852889B2Active spectral control of DUV light sourceCYMER INC·Filed 2006·Granted Dec 14, 2010·3 cites·21 claims
- 2270US7830942B2Ultraviolet laser light source pulse energy control systemCYMER INC·Filed 2007·Granted Nov 9, 2010·3 cites·20 claims
- 2369US8872123B2Method of timing laser beam pulses to regulate extreme ultraviolet light dosingCYMER INC·Filed 2013·Granted Oct 28, 2014·3 cites·14 claims
- 2466US7756171B2Method and apparatus for laser control in a two chamber gas discharge laserCYMER INC·Filed 2008·Granted Jul 13, 2010·2 cites·20 claims
- 2565US7643522B2Method and apparatus for gas discharge laser bandwidth and center wavelength controlCYMER INC·Filed 2005·Granted Jan 5, 2010·2 cites·34 claims
- 2665US6959484B1System for vibration controlCYMER INC·Filed 2000·Granted Nov 1, 2005·17 cites·28 claims
- 2763US6454303B2Method and apparatus for vibration controlDELPHI TECH INC·Filed 2001·Granted Sep 24, 2002·16 cites·37 claims
- 2862US7298770B2Laser spectral engineering for lithographic processCYMER INC·Filed 2004·Granted Nov 20, 2007·4 cites·58 claims
- 2957US7116695B2Laser output light pulse beam parameter transient correction systemCYMER INC·Filed 2004·Granted Oct 3, 2006·4 cites·93 claims
- 3051US6872961B2Vibration control utilizing signal detrendingCYMER INC·Filed 2002·Granted Mar 29, 2005·6 cites·11 claims
- 3151US2010074295A1Immersion lithography laser light source with pulse stretcherCYMER INC·Filed 2009·Application pending·0 cites
- 3251US2023269858A1Systems and methods for laser-to-droplet alignmentASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 3350US7751453B2Method and apparatus for laser control in a two chamber gas discharge laserCYMER INC·Filed 2008·Granted Jul 6, 2010·0 cites·20 claims
- 3449US7720120B2Method and apparatus for laser control in a two chamber gas discharge laserCYMER INC·Filed 2008·Granted May 18, 2010·0 cites·20 claims
- 3541US2005200243A1Method and device for vibration controlACTIVE CONTROL EXPERTS INC·Filed 2005·Application pending·0 cites
- 3636US2002099475A1Method and device for vibration controlFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →