Inventor · disambiguated record
Yoshihiro Yanagi
Also filed as: YANAGI YOSHIHIRO
9 granted patents·2 pending applications·246 citations·filing 1995–2025
86Inventor score
Top patents by PatentIndex Score
11 records- 0191US5888413APlasma processing method and apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1996·Granted Mar 30, 1999·125 cites·16 claims
- 0290US5558722APlasma processing apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1995·Granted Sep 24, 1996·80 cites·8 claims
- 0375US5922223APlasma processing method and apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1996·Granted Jul 13, 1999·28 cites·31 claims
- 0463US12387917B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2023·Granted Aug 12, 2025·0 cites·10 claims
- 0561US11380568B2Transfer method and transfer systemTOKYO ELECTRON LTD·Filed 2020·Granted Jul 5, 2022·0 cites·14 claims
- 0656US10861729B2Transfer method and transfer systemTOKYO ELECTRON LTD·Filed 2019·Granted Dec 8, 2020·0 cites·7 claims
- 0752US5711850APlasma processing apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1996·Granted Jan 27, 1998·13 cites·8 claims
- 0850US2025232965A1Substrate processing systemTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0939US7205250B2Plasma processing method and apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2004·Granted Apr 17, 2007·0 cites·8 claims
- 1036US2004139917A1Plasma processing apparatusFiled 2003·Application pending·0 cites
- 1133US6875698B2Dry etching methodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2001·Granted Apr 5, 2005·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →