Inventor · disambiguated record

Dzimtry Sanko

Also filed as: SANKO DZIMTRY

1 granted patent·5 citations·filing 2015–2015

26Inventor score

Technology areasG03F

Files withKLA TENCOR CORP1

Top patents by PatentIndex Score

1 record

0189US9934353B2Focus measurements using scatterometry metrologyKLA TENCOR CORP·Filed 2015·Granted Apr 3, 2018·5 cites·22 claims

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