Inventor · disambiguated record
Jennifer Leigh Petraglia
Also filed as: PETRAGLIA JENNIFER · PETRAGLIA JENNIFER L · PETRAGLIA JENNIFER LEIGH
15 granted patents·9 pending applications·95 citations·filing 2013–2024
91Inventor score
Top patents by PatentIndex Score
24 records- 0197US9677176B2Multi-plenum, dual-temperature showerheadNOVELLUS SYSTEMS INC·Filed 2013·Granted Jun 13, 2017·41 cites·24 claims
- 0296US10665429B2Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformityLAM RES CORP·Filed 2017·Granted May 26, 2020·6 cites·20 claims
- 0396US9793096B2Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformityLAM RES CORP·Filed 2015·Granted Oct 17, 2017·16 cites·18 claims
- 0495US10378107B2Low volume showerhead with faceplate holes for improved flow uniformityLAM RES CORP·Filed 2015·Granted Aug 13, 2019·11 cites·26 claims
- 0594US11072860B2Fill on demand ampoule refillLAM RES CORP·Filed 2015·Granted Jul 27, 2021·6 cites·14 claims
- 0689US11959175B2Fill on demand ampoule refillLAM RES CORP·Filed 2021·Granted Apr 16, 2024·1 cites·19 claims
- 0788US10214816B2PECVD apparatus for in-situ deposition of film stacksNOVELLUS SYSTEMS INC·Filed 2014·Granted Feb 26, 2019·6 cites·9 claims
- 0885US2024218515A1Fill on demand ampoule refillLAM RES CORP·Filed 2024·Application pending·0 cites
- 0983US12385138B2Plasma-enhanced deposition of film stacksNOVELLUS SYSTEMS INC·Filed 2023·Granted Aug 12, 2025·0 cites·11 claims
- 1081US12412742B2Impurity reduction in silicon-containing filmsLAM RES CORP·Filed 2021·Granted Sep 9, 2025·1 cites·20 claims
- 1181US9624578B2Method for RF compensation in plasma assisted atomic layer depositionLAM RES CORP·Filed 2014·Granted Apr 18, 2017·2 cites·13 claims
- 1280US11236422B2Multi zone substrate support for ALD film property correction and tunabilityLAM RES CORP·Filed 2018·Granted Feb 1, 2022·3 cites·8 claims
- 1376US11661654B2Substrate processing systems including gas delivery system with reduced dead legsLAM RES CORP·Filed 2018·Granted May 30, 2023·2 cites·10 claims
- 1469US11959172B2Substrate processing systems including gas delivery system with reduced dead legsLAM RES CORP·Filed 2023·Granted Apr 16, 2024·0 cites·10 claims
- 1569US11127567B2Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformityLAM RES CORP·Filed 2020·Granted Sep 21, 2021·0 cites·24 claims
- 1662US2025340984A1Nonconformal oxide film deposition using carbon-containing inhibitorLAM RES CORP·Filed 2023·Application pending·0 cites
- 1754US2014235069A1Multi-plenum showerhead with temperature controlNOVELLUS SYSTEMS INC·Filed 2013·Application pending·0 cites
- 1854US2025197996A1Low-k dielectric protection during plasma deposition of silicon nitrideLAM RES CORP·Filed 2023·Application pending·0 cites
- 1953US2025179632A1Surface inhibition atomic layer depositionLAM RES CORP·Filed 2023·Application pending·0 cites
- 2051US2024234112A1Image analysis of plasma conditionsLAM RES CORP·Filed 2022·Application pending·0 cites
- 2149US2025250666A1Lateral gap fillLAM RES CORP·Filed 2023·Application pending·0 cites
- 2249US2025166989A1Thermal film depositionLAM RES CORP·Filed 2023·Application pending·0 cites
- 2343US12421602B2Multi-station semiconductor processing with independently adjustable pedestalsLAM RES CORP·Filed 2020·Granted Sep 23, 2025·0 cites·24 claims
- 2434US2017053781A1Multi-Station Chamber Having Symmetric Grounding PlateLAM RES CORP·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →