Inventor · disambiguated record
Gregory Allen Rechtsteiner
Also filed as: RECHTSTEINER GREGORY ALLEN
7 granted patents·2 pending applications·28 citations·filing 2014–2024
78Inventor score
Technology areasG03F
Top patents by PatentIndex Score
9 records- 0196US9989866B2Wafer-based light source parameter controlCymer LLC·Filed 2016·Granted Jun 5, 2018·18 cites·50 claims
- 0291US9715180B2Wafer-based light source parameter controlCymer LLC·Filed 2014·Granted Jul 25, 2017·9 cites·30 claims
- 0382US2024310736A1Forming multiple aerial images in a single lithography exposure passCymer LLC·Filed 2024·Application pending·0 cites
- 0479US12001144B2Forming multiple aerial images in a single lithography exposure passCymer LLC·Filed 2022·Granted Jun 4, 2024·0 cites·21 claims
- 0566US9709897B2Polarization control of pulsed light beamCymer LLC·Filed 2015·Granted Jul 18, 2017·1 cites·23 claims
- 0663US11526082B2Forming multiple aerial images in a single lithography exposure passCymer LLC·Filed 2018·Granted Dec 13, 2022·0 cites·27 claims
- 0755US10268123B2Wafer-based light source parameter controlCymer LLC·Filed 2018·Granted Apr 23, 2019·0 cites·20 claims
- 0853US10036960B2Wafer-based light source parameter controlCymer LLC·Filed 2017·Granted Jul 31, 2018·0 cites·25 claims
- 0946US2021349404A1Method to create the ideal source spectra with source and mask optimizationASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →