Inventor · disambiguated record
Kouichi Noto
Also filed as: NOTO KOUICHI
6 granted patents·3 pending applications·1,011 citations·filing 2000–2003
87Inventor score
Top patents by PatentIndex Score
9 records- 0197US6540469B2Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2001·Granted Apr 1, 2003·475 cites·12 claims
- 0296US7198447B2Semiconductor device producing apparatus and producing method of semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2003·Granted Apr 3, 2007·462 cites·11 claims
- 0386US6368049B1Semiconductor manufacturing method and semiconductor manufacturing apparatusKOKUSAI ELECTRIC CO LTD·Filed 2000·Granted Apr 9, 2002·47 cites·18 claims
- 0471US6638860B2Method and apparatus for processing substrates and method for manufacturing a semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2001·Granted Oct 28, 2003·14 cites·19 claims
- 0562US6658321B2Substrate processing method and apparatusHITACHI INT ELECTRIC INC·Filed 2001·Granted Dec 2, 2003·9 cites·8 claims
- 0654US6927165B2Method and apparatus for processing substrates and method for manufacturing a semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2003·Granted Aug 9, 2005·4 cites·17 claims
- 0738US2003053893A1Substrate processing apparatus and a method for fabricating a semiconductor device by using sameHITACHI INT ELECTRIC INC·Filed 2002·Application pending·0 cites
- 0836US2003077150A1Substrate processing apparatus and a method for fabricating a semiconductor device by using sameHITACHI INT ELECTRIC INC·Filed 2002·Application pending·0 cites
- 0935US2002070095A1Semiconductor manfacturing method and semiconductor manfacturing apparatusKOUSAI ELECTRIC CO LTD·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →