Inventor · disambiguated record
Joerg Lichtenthaeler
Also filed as: LICHTENTHAELER JOERG
2 granted patents·4 citations·filing 2018–2019
44Inventor score
Technology areasG03F
Files withZEISS CARL SMT GMBH2
Top patents by PatentIndex Score
2 records- 0187US10514608B2Method for producing an illumination system for an EUV projection exposure system, and illumination systemZEISS CARL SMT GMBH·Filed 2018·Granted Dec 24, 2019·4 cites·25 claims
- 0259US11048172B2Method for producing an illumination system for an EUV projection exposure system, and illumination systemZEISS CARL SMT GMBH·Filed 2019·Granted Jun 29, 2021·0 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →