Inventor · disambiguated record
Motoshi Sawada
Also filed as: SAWADA MOTOSHI
5 granted patents·1 pending application·64 citations·filing 1998–2016
80Inventor score
Top patents by PatentIndex Score
6 records- 0193US9869022B2Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2015·Granted Jan 16, 2018·10 cites·7 claims
- 0287US10032626B2Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus, and recording mediumHITACHI INT ELECTRIC INC·Filed 2014·Granted Jul 24, 2018·9 cites·15 claims
- 0386US9816183B2Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2016·Granted Nov 14, 2017·5 cites·18 claims
- 0450US6154166AMicrowave detectorYUPITERU IND CO LTD·Filed 1998·Granted Nov 28, 2000·31 cites·15 claims
- 0537US6049313AMicrowave detectorYUPITERU IND CO LTD·Filed 1998·Granted Apr 11, 2000·9 cites·14 claims
- 0633US2017076964A1Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →