Inventor · disambiguated record
Mamoru Sueyoshi
Also filed as: SUEYOSHI MAMORU
4 granted patents·88 citations·filing 1997–2014
77Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0187US10032626B2Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus, and recording mediumHITACHI INT ELECTRIC INC·Filed 2014·Granted Jul 24, 2018·9 cites·15 claims
- 0280US6217663B1Substrate processing apparatus and substrate processing methodKOKUSAI ELECTRIC CO LTD·Filed 1997·Granted Apr 17, 2001·69 cites·58 claims
- 0364US6576063B2Apparatus and method for use in manufacturing a semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2001·Granted Jun 10, 2003·8 cites·16 claims
- 0450US7033937B2Apparatus and method for use in manufacturing a semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2003·Granted Apr 25, 2006·2 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →