Inventor · disambiguated record
Tomokatsu Sato
Also filed as: SATO TOMOKATSU
4 granted patents·24 citations·filing 2002–2018
73Inventor score
Top patents by PatentIndex Score
4 records- 0184US10761422B2Processing fluid supply device, substrate processing device, processing fluid supply method, substrate processing method, processing fluid processing device, and processing fluid processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Sep 1, 2020·3 cites·13 claims
- 0277US7397647B2Ionized gas current emission type dust-free ionizerTECHNO RYOWA LTD·Filed 2006·Granted Jul 8, 2008·8 cites·18 claims
- 0368US7126807B2Ionized air flow discharge type non-dusting ionizerHARADA CORP·Filed 2002·Granted Oct 24, 2006·12 cites·30 claims
- 0465US10133173B2Processing fluid supply device, substrate processing device, processing fluid supply method, substrate processing method, processing fluid processing device, and processing fluid processing methodSCREEN HOLDINGS CO LTD·Filed 2013·Granted Nov 20, 2018·1 cites·42 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →