Inventor · disambiguated record
Anthony J. Ricci
Also filed as: RICCI ANTHONY · RICCI ANTHONY J · RICCI ANTHONY JOHN · RICCI ANTHONY P M
27 granted patents·8 pending applications·468 citations·filing 1994–2022
97Inventor score
Top patents by PatentIndex Score
35 records- 0197US9779955B2Ion beam etching utilizing cryogenic wafer temperaturesLAM RES CORP·Filed 2016·Granted Oct 3, 2017·21 cites·18 claims
- 0297US8587113B2Thermal plate with planar thermal zones for semiconductor processingLAM RES CORP·Filed 2013·Granted Nov 19, 2013·40 cites·18 claims
- 0397US8461674B2Thermal plate with planar thermal zones for semiconductor processingGAFF KEITH WILLIAM·Filed 2011·Granted Jun 11, 2013·63 cites·18 claims
- 0496US9673025B2Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and controlLAM RES CORP·Filed 2016·Granted Jun 6, 2017·10 cites·22 claims
- 0593US7431788B2Method of protecting a bond layer in a substrate support adapted for use in a plasma processing systemLAM RES CORP·Filed 2005·Granted Oct 7, 2008·36 cites·29 claims
- 0691US9728429B2Parasitic plasma prevention in plasma processing chambersRICCI ANTHONY·Filed 2010·Granted Aug 8, 2017·51 cites·15 claims
- 0790US10879053B2Temperature controlled substrate support assemblyLAM RES CORP·Filed 2016·Granted Dec 29, 2020·5 cites·14 claims
- 0890US8410393B2Apparatus and method for temperature control of a semiconductor substrate supportRICCI ANTHONY·Filed 2010·Granted Apr 2, 2013·16 cites·24 claims
- 0988US10014161B2Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and controlLAM RES CORP·Filed 2017·Granted Jul 3, 2018·3 cites·26 claims
- 1086US5548470ACharacterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformityIBM·Filed 1994·Granted Aug 20, 1996·89 cites·21 claims
- 1185US8735298B2Method for spatial and temporal control of temperature on a substrateLAM RES CORP·Filed 2012·Granted May 27, 2014·4 cites·21 claims
- 1285US8038796B2Apparatus for spatial and temporal control of temperature on a substrateLAM RES CORP·Filed 2004·Granted Oct 18, 2011·21 cites·19 claims
- 1382US10192767B2Ceramic electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and controlLAM RES CORP·Filed 2018·Granted Jan 29, 2019·2 cites·20 claims
- 1481US8051556B2Method of manufacturing apparatus for spatial and temporal control of temperature on a substrateLAM RES CORP·Filed 2008·Granted Nov 8, 2011·4 cites·20 claims
- 1579US11289306B2Ion beam etching utilizing cryogenic wafer temperaturesLAM RES CORP·Filed 2017·Granted Mar 29, 2022·2 cites·10 claims
- 1679US10079168B2Ceramic electrostatic chuck including embedded Faraday cage for RF delivery and associated methods for operation, monitoring, and controlLAM RES CORP·Filed 2017·Granted Sep 18, 2018·2 cites·20 claims
- 1777US10475623B2Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methodsLAM RES CORP·Filed 2017·Granted Nov 12, 2019·1 cites·18 claims
- 1874US10892197B2Edge seal configurations for a lower electrode assemblyLAM RES CORP·Filed 2018·Granted Jan 12, 2021·1 cites·16 claims
- 1974US6408845B1Respiratory filterFiled 1998·Granted Jun 25, 2002·47 cites·20 claims
- 2073US11302556B2Apparatus for spatial and temporal control of temperature on a substrateLAM RES CORP·Filed 2020·Granted Apr 12, 2022·0 cites·19 claims
- 2172US10090211B2Edge seal for lower electrode assemblyLAM RES CORP·Filed 2013·Granted Oct 2, 2018·2 cites·19 claims
- 2272US8821639B2Apparatus for spatial and temporal control of temperature on a substrateRICCI ANTHONY J·Filed 2011·Granted Sep 2, 2014·2 cites·7 claims
- 2370US10892179B2Electrostatic chuck including clamp electrode assembly forming portion of Faraday cage for RF delivery and associated methodsLAM RES CORP·Filed 2017·Granted Jan 12, 2021·1 cites·18 claims
- 2468US6044842AGasketless connecting adapterFiled 1998·Granted Apr 4, 2000·44 cites·21 claims
- 2566US11101107B2Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methodsLAM RES CORP·Filed 2019·Granted Aug 24, 2021·0 cites·22 claims
- 2664US9238670B2Aminoglycoside antibiotics with reduced ototoxicityUNIV LELAND STANFORD JUNIOR·Filed 2014·Granted Jan 19, 2016·1 cites·19 claims
- 2760US10636689B2Apparatus for spatial and temporal control of temperature on a substrateLAM RES CORP·Filed 2014·Granted Apr 28, 2020·0 cites·18 claims
- 2852US2023245862A1Delivery of high concentrations of molecular hydrogen and other gases to substrate processing systemsLAM RES CORP·Filed 2022·Application pending·0 cites
- 2951US2014356985A1Temperature controlled substrate support assemblyLAM RES CORP·Filed 2013·Application pending·0 cites
- 3046US2007098368A1Mobile recording studio systemCARLEY THOMAS·Filed 2006·Application pending·0 cites
- 3146US2023127806A1Substrate support temperature probe diagnostics and managementLAM RES CORP·Filed 2020·Application pending·0 cites
- 3245US2022096509A1Reformulating Hospital Gentamicin to reduce the risk of hearing loss while maintaining antimicrobial activityUNIV LELAND STANFORD JUNIOR·Filed 2020·Application pending·0 cites
- 3344US2016222049A1Aminoglycoside Antibiotics with Reduced OtotoxicityUNIV LELAND STANFORD JUNIOR·Filed 2015·Application pending·0 cites
- 3440US2004244685A1Pretreated gas distribution plateLAM RES CORP·Filed 2004·Application pending·0 cites
- 3536US2019024970A1Beverage Cooling ApparatusSAPIA FRANCO·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →