Inventor · disambiguated record
Tilman Schwertner
Also filed as: SCHWERTNER TILMAN
6 granted patents·1 pending application·12 citations·filing 2007–2016
73Inventor score
Top patents by PatentIndex Score
7 records- 0168US7869147B2Holding device for optical elementZEISS CARL SMT GMBH·Filed 2007·Granted Jan 11, 2011·5 cites·47 claims
- 0265US8441747B2Optical module with minimized overrun of the optical elementHEINTEL WILLI·Filed 2007·Granted May 14, 2013·6 cites·15 claims
- 0358US10203607B2Optical element unit for exposure processesZEISS CARL SMT GMBH·Filed 2014·Granted Feb 12, 2019·0 cites·29 claims
- 0456US9046795B2Optical element unit for exposure processes having sealing elementSCHWERTNER TILMAN·Filed 2008·Granted Jun 2, 2015·1 cites·52 claims
- 0544US9086561B2Optical arrangement in a projection objective of a microlithographic projection exposure apparatusROSTALSKI HANS-JUERGEN·Filed 2011·Granted Jul 21, 2015·0 cites·17 claims
- 0640US8553202B2Projection objective for microlithographyKUGLER JENS·Filed 2010·Granted Oct 8, 2013·0 cites·30 claims
- 0732US2016334719A1Subassembly of an optical system, in particular in a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →