Inventor · disambiguated record
Michael Rivkin
Also filed as: RIVKIN MICHAEL · RIVKIN MICHAEL S
15 granted patents·4 pending applications·336 citations·filing 1992–2019
94Inventor score
Top patents by PatentIndex Score
19 records- 0195US8629068B1Multi-station sequential curing of dielectric filmsSHRINIVASAN KRISHNAN·Filed 2013·Granted Jan 14, 2014·25 cites·3 claims
- 0295US8454750B1Multi-station sequential curing of dielectric filmsSHRINIVASAN KRISHNAN·Filed 2007·Granted Jun 4, 2013·37 cites·22 claims
- 0394US7960297B1Load lock design for rapid wafer heatingNOVELLUS SYSTEMS INC·Filed 2006·Granted Jun 14, 2011·44 cites·22 claims
- 0494US7941039B1Pedestal heat transfer and temperature controlNOVELLUS SYSTEMS INC·Filed 2007·Granted May 10, 2011·36 cites·15 claims
- 0593US10349234B1Bi-directional integration and control of managed and unmanaged devicesDEV LLC·Filed 2017·Granted Jul 9, 2019·15 cites·19 claims
- 0691US8980769B1Multi-station sequential curing of dielectric filmsHAVERKAMP JASON·Filed 2007·Granted Mar 17, 2015·19 cites·16 claims
- 0788US8273670B1Load lock design for rapid wafer heatingRIVKIN MICHAEL·Filed 2011·Granted Sep 25, 2012·16 cites·18 claims
- 0883US9873946B2Multi-station sequential curing of dielectric filmsNOVELLUS SYSTEMS INC·Filed 2015·Granted Jan 23, 2018·3 cites·18 claims
- 0982US6270582B1Single wafer load lock chamber for pre-processing and post-processing wafers in a vacuum processing systemAPPLIED MATERIALS INC·Filed 1997·Granted Aug 7, 2001·85 cites·40 claims
- 1076US10986470B2Bi-directional integration and control of managed and unmanaged devicesZODIAC SYSTEMS LLC·Filed 2019·Granted Apr 20, 2021·2 cites·13 claims
- 1169US7176140B1Adhesion promotion for etch by-productsNOVELLUS SYSTEMS INC·Filed 2004·Granted Feb 13, 2007·12 cites·19 claims
- 1265US9271051B1System and method for call placement using a television set-top boxDevelopOnBox LLC·Filed 2014·Granted Feb 23, 2016·4 cites·17 claims
- 1356US5356158AResilient rotary seal with projecting edgeROTOFLEX INC·Filed 1992·Granted Oct 18, 1994·21 cites·10 claims
- 1454US2014080324A1Multi-station sequential curing of dielectric filmsNOVELLUS SYSTEMS INC·Filed 2013·Application pending·0 cites
- 1552US2013078375A1Deposition source integration into coaterKROTOV PETER·Filed 2012·Application pending·0 cites
- 1651US9328410B2Physical vapor deposition tile arrangement and physical vapor deposition arrangementARDENNE GMBH VON·Filed 2013·Granted May 3, 2016·0 cites·19 claims
- 1751US6374150B2Method and apparatus for monitoring and/or end point detecting a processAPPLIED MATERIALS INC·Filed 1998·Granted Apr 16, 2002·17 cites·7 claims
- 1849US2012052189A1Vapor deposition systemLIU LITIAN·Filed 2011·Application pending·0 cites
- 1947US2009277472A1Photoresist Stripping Method and ApparatusNOVELLUS SYSTEMS INC·Filed 2009·Application pending·0 cites
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