Inventor · disambiguated record
Sami Musa
Also filed as: MUSA SAMI
14 granted patents·4 pending applications·68 citations·filing 2005–2015
90Inventor score
Files withASML NETHERLANDS BV10MUSA SAMI2VAN HAREN RICHARD JOHANNES FRANCISCUS2BIJNEN FRANCISCUS GODEFRIDUS CASPER1DECKERS DAVID1
Top patents by PatentIndex Score
18 records- 0192US7863763B2Binary sinusoidal sub-wavelength gratings as alignment marksASML NETHERLANDS BV·Filed 2005·Granted Jan 4, 2011·17 cites·13 claims
- 0289US7545520B2System and method for CD determination using an alignment sensor of a lithographic apparatusASML NETHERLANDS BV·Filed 2006·Granted Jun 9, 2009·12 cites·19 claims
- 0387US9046385B2Alignment measurement system, lithographic apparatus, and a method to determine alignment in a lithographic apparatusBIJNEN FRANCISCUS GODEFRIDUS CASPER·Filed 2011·Granted Jun 2, 2015·5 cites·13 claims
- 0487US7460231B2Alignment tool for a lithographic apparatusASML NETHERLANDS BV·Filed 2006·Granted Dec 2, 2008·9 cites·7 claims
- 0579US8072615B2Alignment method, alignment system, and product with alignment markMUSA SAMI·Filed 2008·Granted Dec 6, 2011·11 cites·15 claims
- 0671US9746785B2Sub-wavelength segmentation in measurement targets on substratesVAN DER SCHAAR MAURITS·Filed 2009·Granted Aug 29, 2017·5 cites·21 claims
- 0767US7737566B2Alignment devices and methods for providing phase depth controlASML NETHERLANDS BV·Filed 2006·Granted Jun 15, 2010·2 cites·18 claims
- 0865US7598024B2Method and system for enhanced lithographic alignmentASML NETHERLANDS BV·Filed 2006·Granted Oct 6, 2009·2 cites·23 claims
- 0962US7944063B2Application of 2-dimensional photonic crystals in alignment devicesASML NETHERLANDS BV·Filed 2006·Granted May 17, 2011·2 cites·22 claims
- 1061US10151987B2Measuring method, apparatus and substrateDECKERS DAVID·Filed 2011·Granted Dec 11, 2018·1 cites·20 claims
- 1155US8319967B2Marker structure and method of forming the sameVAN HAREN RICHARD JOHANNES FRANCISCUS·Filed 2008·Granted Nov 27, 2012·0 cites·12 claims
- 1255US8203692B2Sub-segmented alignment mark arrangementMUSA SAMI·Filed 2009·Granted Jun 19, 2012·1 cites·16 claims
- 1353US9280057B2Alignment measurement system, lithographic apparatus, and a method to determine alignment of in a lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Mar 8, 2016·0 cites·16 claims
- 1452US8243259B2Lithographic apparatusPROSYENTSOV VITALLY·Filed 2009·Granted Aug 14, 2012·1 cites·15 claims
- 1551US2013070226A1Marker structure and method of forming the sameVAN HAREN RICHARD JOHANNES FRANCISCUS·Filed 2012·Application pending·0 cites
- 1650US2007212648A1Method and system for enhanced lithographic patterningASML NETHERLANDS BV·Filed 2007·Application pending·0 cites
- 1748US2007212649A1Method and system for enhanced lithographic patterningASML NETHERLANDS BV·Filed 2006·Application pending·0 cites
- 1840US2011273685A1Production of an alignment markASML NETHERLANDS BV·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →