Inventor · disambiguated record
Atsushi Kawabe
Also filed as: KAWABE ATSUSHI
7 granted patents·1 pending application·53 citations·filing 1986–2019
81Inventor score
Top patents by PatentIndex Score
8 records- 0181US11127614B2Substrate transfer method and substrate transfer apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Sep 21, 2021·3 cites·9 claims
- 0280US11527426B2Substrate processing deviceTOKYO ELECTRON LTD·Filed 2018·Granted Dec 13, 2022·3 cites·9 claims
- 0370US4762168ACondenser having apparatus for monitoring conditions of inner surface of condenser tubesSUMITOMO LIGHT METAL IND·Filed 1986·Granted Aug 9, 1988·29 cites·5 claims
- 0463US6832348B2Semiconductor integrated circuit having self-diagnosis test function and test method thereofMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2000·Granted Dec 14, 2004·11 cites·8 claims
- 0547US12159798B2Transfer detection method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Dec 3, 2024·0 cites·9 claims
- 0640US2015255257A1Substrate cooling member, substrate processing device, and substrate processing methodTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0739US10896835B2Processing systemTOKYO ELECTRON LTD·Filed 2018·Granted Jan 19, 2021·0 cites·6 claims
- 0836US4776384AMethod for monitoring copper-alloy tubes for maintaining corrosion resistance and cleanliness factor of their inner surfacesSUMITOMO LIGHT METAL IND·Filed 1986·Granted Oct 11, 1988·7 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →