Inventor · disambiguated record
Yoko Naito
Also filed as: NAITO YOKO
5 granted patents·218 citations·filing 1997–2001
85Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0186US6355902B2Plasma film forming method and plasma film forming apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Mar 12, 2002·23 cites·6 claims
- 0285US6215087B1Plasma film forming method and plasma film forming apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Apr 10, 2001·57 cites·7 claims
- 0381US6333269B2Plasma treatment system and methodTOKYO ELECTRON LTD·Filed 1998·Granted Dec 25, 2001·67 cites·2 claims
- 0476US6218299B1Semiconductor device and method for producing the sameTOKYO ELECTRON LTD·Filed 1997·Granted Apr 17, 2001·47 cites·8 claims
- 0559US6443165B1Method for cleaning plasma treatment device and plasma treatment systemTOKYO ELECTRON LTD·Filed 1997·Granted Sep 3, 2002·24 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →