Inventor · disambiguated record
Xingcai Su
Also filed as: SU XINGCAI
5 granted patents·1 pending application·77 citations·filing 2002–2020
77Inventor score
Top patents by PatentIndex Score
6 records- 0191US7169231B2Gas distribution system with tuning gasLAM RES CORP·Filed 2002·Granted Jan 30, 2007·47 cites·13 claims
- 0286US7371332B2Uniform etch systemLAM RES CORP·Filed 2003·Granted May 13, 2008·29 cites·11 claims
- 0363US8801892B2Uniform etch systemLARSON DEAN J·Filed 2008·Granted Aug 12, 2014·1 cites·7 claims
- 0459US7041230B2Method for selectively etching organosilicate glass with respect to a doped silicon carbideLAM RES CORP·Filed 2003·Granted May 9, 2006·0 cites·9 claims
- 0544US11189496B2Plasma reactor for ultra-high aspect ratio etching and etching method thereofADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2020·Granted Nov 30, 2021·0 cites·13 claims
- 0638US2004112540A1Uniform etch systemLAM RES CORP·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →