Inventor · disambiguated record
Timothy R. Groves
Also filed as: GROVES TIMOTHY · GROVES TIMOTHY R
13 granted patents·1 pending application·299 citations·filing 1982–2004
93Inventor score
Top patents by PatentIndex Score
14 records- 0190US5981962ADistributed direct write lithography system using multiple variable shaped electron beamsIBM·Filed 1998·Granted Nov 9, 1999·76 cites·38 claims
- 0287US6175122B1Method for writing a pattern using multiple variable shaped electron beamsIBM·Filed 1998·Granted Jan 16, 2001·57 cites·12 claims
- 0381US4455561AElectron beam driven ink jet printerHEWLETT PACKARD CO·Filed 1982·Granted Jun 19, 1984·28 cites·60 claims
- 0479US5585629AElectron beam nano-metrology systemIBM·Filed 1996·Granted Dec 17, 1996·36 cites·11 claims
- 0576US4859856ATelecentric sub-field deflection with vailIBM·Filed 1988·Granted Aug 22, 1989·21 cites·7 claims
- 0673US5962859AMultiple variable shaped electron beam system with lithographic structureIBM·Filed 1998·Granted Oct 5, 1999·28 cites·33 claims
- 0765US6822248B2Spatial phase locking with shaped electron beam lithographyIBM·Filed 2001·Granted Nov 23, 2004·13 cites·20 claims
- 0860US5916716AEmulation methodology for critical dimension control in E-Beam lithographyIBM·Filed 1997·Granted Jun 29, 1999·16 cites·15 claims
- 0947US4737644AConductive coated semiconductor electrostatic deflection platesIBM·Filed 1985·Granted Apr 12, 1988·7 cites·12 claims
- 1045US6296976B1Compensation of within-subfield linewidth variation in e-beam projection lithographyNIKON CORP·Filed 1999·Granted Oct 2, 2001·6 cites·26 claims
- 1144US5756234AHigh accuracy fabrication of X-ray masks with optical and E-beam lithographyIBM·Filed 1996·Granted May 26, 1998·8 cites·10 claims
- 1243US7053388B2Dual-mode electron beam lithography machineLEICA MICROSYS LITHOGRAPHY LTD·Filed 2004·Granted May 30, 2006·1 cites·16 claims
- 1335US6369396B1Calibration target for electron beamsIBM·Filed 1999·Granted Apr 9, 2002·2 cites·19 claims
- 1435US2005035308A1Pattern writing equipmentLEICA MICROSYS LITHOGRAPHY LTD·Filed 2004·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Timothy R. Groves files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →