Inventor · disambiguated record
Yuh-Hwa Chang
Also filed as: CHANG YUH-HWA
12 granted patents·3 pending applications·200 citations·filing 2002–2008
89Inventor score
Top patents by PatentIndex Score
15 records- 0197US6841081B2Method for manufacturing reflective spatial light modulator mirror devicesTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Jan 11, 2005·159 cites·28 claims
- 0264US7057794B2Micromirror for MEMS deviceTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Jun 6, 2006·9 cites·20 claims
- 0363US6958249B1Method to monitor process charging effectTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Oct 25, 2005·10 cites·17 claims
- 0461US6929969B2Reflective spatial light modulator mirror device manufacturing process and layout methodTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Aug 16, 2005·7 cites·19 claims
- 0560US6947196B2Trench-embedded mirror structure for double substrate spatial light modulatorTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Sep 20, 2005·7 cites·11 claims
- 0656US7838427B2Method for planarizationTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Nov 23, 2010·1 cites·20 claims
- 0755US7205176B2Surface MEMS mirrors with oxide spacersTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Apr 17, 2007·5 cites·18 claims
- 0847US8324705B2Schottky diodes having low-voltage and high-concentration ringsTANG CHIEN-SHAO·Filed 2008·Granted Dec 4, 2012·1 cites·15 claims
- 0944US7095544B2Micromirror and products using the sameTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Aug 22, 2006·1 cites·10 claims
- 1039US7153768B2Backside coating for MEMS waferTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted Dec 26, 2006·0 cites·13 claims
- 1135US8846149B2Delamination resistant semiconductor film and method for forming the sameCHANG YUH-HWA·Filed 2006·Granted Sep 30, 2014·0 cites·13 claims
- 1235US7384799B2Method to avoid amorphous-si damage during wet stripping processes in the manufacture of MEMS devicesTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted Jun 10, 2008·0 cites·18 claims
- 1333US2005287740A1System and method of forming a split-gate flash memory cellTAIWAN SEMICONDUCTOR MFG·Filed 2004·Application pending·0 cites
- 1432US2005057792A1Method of forming a micromechanical structureFiled 2003·Application pending·0 cites
- 1532US2006110842A1Method and apparatus for preventing metal/silicon spiking in MEMS devicesCHANG YUH-HWA·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →