Inventor · disambiguated record
Henricus Petrus Maria Pellemans
Also filed as: PELLEMANS HENRICUS PETRUS M · PELLEMANS HENRICUS PETRUS MARI · PELLEMANS HENRICUS PETRUS MARIA
33 granted patents·7 pending applications·416 citations·filing 2003–2025
97Inventor score
Files withASML NETHERLANDS BV33ASML NETHERLANDS1CRAMER HUGO AUGUSTINUS JOSEPH1DEN BOEF ARIE JEFFREY1DEN BOEF ARIE JEFFREY MARIA1
Top patents by PatentIndex Score
40 records- 0198US8760662B2Method and apparatus for angular-resolved spectroscopic lithography characterizationASML NETHERLANDS BV·Filed 2013·Granted Jun 24, 2014·16 cites·7 claims
- 0298US8411287B2Metrology method and apparatus, lithographic apparatus, device manufacturing method and substrateSMILDE HENDRIK JAN HIDDE·Filed 2010·Granted Apr 2, 2013·85 cites·33 claims
- 0398US7791732B2Method and apparatus for angular-resolved spectroscopic lithography characterizationASML NETHERLANDS BV·Filed 2005·Granted Sep 7, 2010·80 cites·15 claims
- 0497US8705007B2Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection methodCRAMER HUGO AUGUSTINUS JOSEPH·Filed 2010·Granted Apr 22, 2014·26 cites·27 claims
- 0597US8054467B2Method and apparatus for angular-resolved spectroscopic lithography characterizationASML NETHERLANDS BV·Filed 2010·Granted Nov 8, 2011·15 cites·13 claims
- 0696US11828585B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodASML NETHERLANDS BV·Filed 2022·Granted Nov 28, 2023·2 cites·36 claims
- 0796US11307024B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Apr 19, 2022·3 cites·21 claims
- 0895US12025925B2Metrology method and lithographic apparatusesASML NETHERLANDS BV·Filed 2020·Granted Jul 2, 2024·6 cites·33 claims
- 0995US8921814B2Photon source, metrology apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Dec 30, 2014·28 cites·20 claims
- 1094US10209061B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Feb 19, 2019·3 cites·16 claims
- 1194US9933250B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Apr 3, 2018·5 cites·14 claims
- 1294US8553218B2Calibration method and apparatusTINNEMANS PATRICIUS ALOYSIUS JACOBUS·Filed 2010·Granted Oct 8, 2013·18 cites·22 claims
- 1393US11360399B2Metrology sensor for position metrologyASML NETHERLANDS BV·Filed 2019·Granted Jun 14, 2022·10 cites·37 claims
- 1493US8553230B2Method and apparatus for angular-resolved spectroscopic lithography characterizationDEN BOEF ARIE JEFFREY MARIA·Filed 2011·Granted Oct 8, 2013·10 cites·8 claims
- 1592US10955353B2Method and apparatus for angular-resolved spectroscopic lithography characterizationASML NETHERLANDS BV·Filed 2019·Granted Mar 23, 2021·2 cites·7 claims
- 1692US9753379B2Inspection apparatus and methods, methods of manufacturing devicesASML NETHERLANDS BV·Filed 2015·Granted Sep 5, 2017·7 cites·24 claims
- 1791US10591283B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Mar 17, 2020·3 cites·14 claims
- 1890US10241055B2Method and apparatus for angular-resolved spectroscopic lithography characterizationASML NETHERLANDS BV·Filed 2014·Granted Mar 26, 2019·3 cites·11 claims
- 1990US9158194B2Metrology method and apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2012·Granted Oct 13, 2015·9 cites·16 claims
- 2090US9128065B2Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection methodASML NETHERLANDS BV·Filed 2014·Granted Sep 8, 2015·5 cites·20 claims
- 2189US12235096B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodASML NETHERLANDS BV·Filed 2023·Granted Feb 25, 2025·0 cites·18 claims
- 2289US7403293B2Metrology apparatus, lithographic apparatus, process apparatus metrology method and device manufacturing methodASML NETHERLANDS·Filed 2006·Granted Jul 22, 2008·15 cites·32 claims
- 2388US9357626B2Photon source, metrology apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted May 31, 2016·7 cites·20 claims
- 2487US8885150B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodPELLEMANS HENRICUS PETRUS MARIA·Filed 2009·Granted Nov 11, 2014·13 cites·19 claims
- 2587US7440079B2Lithographic apparatus, alignment system, and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Oct 21, 2008·10 cites·50 claims
- 2687US6995831B2Lithographic apparatus with alignment subsystem, device manufacturing method, using alignment, and alignment structureASML NETHERLANDS BV·Filed 2005·Granted Feb 7, 2006·8 cites·8 claims
- 2784US8830472B2Method of assessing a model of a substrate, an inspection apparatus and a lithographic apparatusDEN BOEF ARIE JEFFREY·Filed 2009·Granted Sep 9, 2014·8 cites·15 claims
- 2879US7002667B2Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted Feb 21, 2006·15 cites·48 claims
- 2978US11525786B2Method and apparatus for angular-resolved spectroscopic lithography characterizationASML NETHERLANDS BV·Filed 2021·Granted Dec 13, 2022·0 cites·4 claims
- 3074US7869022B2Inspection method and apparatus lithographic apparatus, lithographic processing cell, device manufacturing method and distance measuring systemASML NETHERLANDS BV·Filed 2007·Granted Jan 11, 2011·4 cites·17 claims
- 3166US2025253123A1Charged particle-optical apparatusASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 3265US2024241454A1Metrology method and system and lithographic systemASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 3361US11428925B2Position metrology apparatus and associated optical elementsASML NETHERLANDS BV·Filed 2019·Granted Aug 30, 2022·0 cites·3 claims
- 3460US11372343B2Alignment method and associated metrology deviceASML NETHERLANDS BV·Filed 2020·Granted Jun 28, 2022·0 cites·20 claims
- 3555US2024027913A1Metrology system and coherence adjustersASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 3655US2024094643A1Metrology method and system and lithographic systemASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 3748US2007002336A1Metrology apparatus, lithographic apparatus, process apparatus, metrology method and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Application pending·0 cites
- 3847US2024427253A1Overlay measurement using balanced capacity targetsASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 3943US9921489B2Focus monitoring arrangement and inspection apparatus including such an arrangementASML NETHERLANDS BV·Filed 2015·Granted Mar 20, 2018·0 cites·23 claims
- 4043US2025341642A1System and method for counting particles on a detector during inspectionASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →