Inventor · disambiguated record
Hari Pathangi Sriraman
Also filed as: SRIRAMAN HARI PATHANGI
4 granted patents·1 pending application·11 citations·filing 2011–2018
66Inventor score
Top patents by PatentIndex Score
5 records- 0184US10359706B1Integrated scanning electron microscopy and optical analysis techniques for advanced process controlKLA TENCOR CORP·Filed 2018·Granted Jul 23, 2019·7 cites·29 claims
- 0272US8338296B2Method for forming a catalyst suitable for growth of carbon nanotubesSRIRAMAN HARI PATHANGI·Filed 2011·Granted Dec 25, 2012·3 cites·17 claims
- 0362US10679333B2Defect detection, classification, and process window control using scanning electron microscope metrologyKLA TENCOR CORP·Filed 2018·Granted Jun 9, 2020·1 cites·11 claims
- 0446US10551741B2Method of forming a directed self-assembled layer on a substrateASM IP HOLDING BV·Filed 2017·Granted Feb 4, 2020·0 cites·24 claims
- 0536US2019279914A1Region of interest and pattern of interest generation for critical dimension measurementKLA TENCOR CORP·Filed 2018·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →