Inventor · disambiguated record
Shigeki Sukegawa
Also filed as: SUKEGAWA SHIGEKI
4 granted patents·1 pending application·1 citations·filing 2008–2015
56Inventor score
Top patents by PatentIndex Score
5 records- 0153US8788981B2Method of OPC model building, information-processing apparatus, and method of determining process conditions of semiconductor deviceKIJIMA MIHOKO·Filed 2008·Granted Jul 22, 2014·1 cites·7 claims
- 0249US7834316B2Method for adjusting imaging magnification and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Nov 16, 2010·0 cites·5 claims
- 0341US2016140287A1Template Creation Device for Sample Observation Device, and Sample Observation DeviceHITACHI HIGH TECH CORP·Filed 2014·Application pending·0 cites
- 0436US10984143B2Recipe creation device for use in semiconductor measurement device or semiconductor inspection deviceHITACHI HIGH TECH CORP·Filed 2015·Granted Apr 20, 2021·0 cites·7 claims
- 0535US8552371B2Method for adjusting imaging magnification and charged particle beam apparatusSUKEGAWA SHIGEKI·Filed 2010·Granted Oct 8, 2013·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →