Inventor · disambiguated record
Thomas D. Nguyen
Also filed as: NGUYEN THOMAS · NGUYEN THOMAS D
9 granted patents·274 citations·filing 1997–2006
89Inventor score
Top patents by PatentIndex Score
9 records- 0188US6090304AMethods for selective plasma etchLAM RES CORP·Filed 1997·Granted Jul 18, 2000·104 cites·6 claims
- 0278US6733594B2Method and apparatus for reducing He backside faults during wafer processingLAM RES CORP·Filed 2000·Granted May 11, 2004·20 cites·33 claims
- 0377US6117786AMethod for etching silicon dioxide using fluorocarbon gas chemistryLAM RES CORP·Filed 1998·Granted Sep 12, 2000·63 cites·19 claims
- 0474US6899109B1Method and apparatus for reducing He backside faults during wafer processingLAM RES CORP·Filed 2004·Granted May 31, 2005·16 cites·27 claims
- 0572US7479458B1Methods and apparatus for the optimization of highly selective process gasesLAM RES CORP·Filed 2005·Granted Jan 20, 2009·8 cites·16 claims
- 0668US6217786B1Mechanism for bow reduction and critical dimension control in etching silicon dioxide using hydrogen-containing additive gases in fluorocarbon gas chemistryLAM RES CORP·Filed 1998·Granted Apr 17, 2001·36 cites·32 claims
- 0760US6410451B2Techniques for improving etching in a plasma processing chamberLAM RES CORP·Filed 1999·Granted Jun 25, 2002·26 cites·32 claims
- 0852US7516950B2Cut sheet feederPITNEY BOWES INC·Filed 2006·Granted Apr 14, 2009·1 cites·18 claims
- 0941US7600747B2Platen for cut sheet feederPITNEY BOWES INC·Filed 2006·Granted Oct 13, 2009·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →