Inventor · disambiguated record
Tsun-Cheng Tang
Also filed as: TANG TSUN-CHENG
5 granted patents·2 pending applications·5 citations·filing 2002–2025
66Inventor score
Top patents by PatentIndex Score
7 records- 0175US2025362624A1Lithography system and methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0268US12399440B2Lithography system and methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Aug 26, 2025·0 cites·20 claims
- 0368US11567400B2Method of fabricating a photomask and method of inspecting a photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jan 31, 2023·0 cites·20 claims
- 0453US11048163B2Inspection method of a photomask and an inspection systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jun 29, 2021·0 cites·20 claims
- 0551US6627363B1Utilizing vacuum ultraviolet (VUV) exposure to remove halos of carbon deposition in clear reticle repairTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Sep 30, 2003·5 cites·29 claims
- 0643US11953448B2Method for defect inspectionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Apr 9, 2024·0 cites·20 claims
- 0740US2007012335A1Photomask cleaning using vacuum ultraviolet (VUV) light cleaningCHANG HSIAO C·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →