Inventor · disambiguated record
Charles Schlechte
Also filed as: SCHLECHTE CHARLES
3 granted patents·3 pending applications·7 citations·filing 2020–2024
57Inventor score
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0195US11430643B2Quantification of processing chamber species by electron energy sweepTOKYO ELECTRON LTD·Filed 2020·Granted Aug 30, 2022·7 cites·20 claims
- 0282US12387910B2Plasma processing with broadband RF waveformsTOKYO ELECTRON LTD·Filed 2024·Granted Aug 12, 2025·0 cites·22 claims
- 0373US12020902B2Plasma processing with broadband RF waveformsTOKYO ELECTRON LTD·Filed 2022·Granted Jun 25, 2024·0 cites·20 claims
- 0459US2025308867A1High-performance adaptable sampling systemTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0559US2025364434A1Stress control of high-density carbon hardmask (chm)TOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0652US2023386789A1Systems and Methods for Plasma ProcessTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →