Inventor · disambiguated record
Yoshiaki Tanase
Also filed as: TANASE YOSHIAKI
9 granted patents·703 citations·filing 1994–2012
90Inventor score
Top patents by PatentIndex Score
9 records- 0198US5685914AFocus ring for semiconductor wafer processing in a plasma reactorAPPLIED MATERIALS INC·Filed 1994·Granted Nov 11, 1997·516 cites·19 claims
- 0296US8206075B2Methods and apparatus for sealing a chamberWHITE JOHN M·Filed 2005·Granted Jun 26, 2012·64 cites·16 claims
- 0394US7207766B2Load lock chamber for large area substrate processing systemAPPLIED MATERIALS INC·Filed 2004·Granted Apr 24, 2007·69 cites·33 claims
- 0492US7652223B2Electron beam welding of sputtering target tilesAPPLIED MATERIALS INC·Filed 2005·Granted Jan 26, 2010·17 cites·16 claims
- 0588US8182661B2Controllable target coolingTANASE YOSHIAKI·Filed 2005·Granted May 22, 2012·11 cites·18 claims
- 0679US7651315B2Large area substrate transferring method for aligning with horizontal actuation of lever armAPPLIED MATERIALS INC·Filed 2007·Granted Jan 26, 2010·5 cites·20 claims
- 0771US7282097B2Slit valve door sealAPPLIED MATERIALS INC·Filed 2004·Granted Oct 16, 2007·17 cites·22 claims
- 0853US10294559B2Target cooling through gun drilled holesTANASE YOSHIAKI·Filed 2012·Granted May 21, 2019·0 cites·23 claims
- 0949US7575220B2Curved slit valve doorAPPLIED MATERIALS INC·Filed 2004·Granted Aug 18, 2009·4 cites·34 claims
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