Inventor · disambiguated record
Shunji Kawato
Also filed as: KAWATO SHUNJI
5 granted patents·5 pending applications·0 citations·filing 2001–2020
57Inventor score
Top patents by PatentIndex Score
10 records- 0150US10513632B2Film-forming composition and film-forming method using sameAZ ELECTRONIC MAT LUXEMBOURG SARL·Filed 2014·Granted Dec 24, 2019·0 cites·20 claims
- 0244US2022187706A1Thin film resist composition and method for manufacturing resist film using the sameMERCK PATENT GMBH·Filed 2020·Application pending·0 cites
- 0340US10875969B2Composition for forming coating film and method for forming coating film using sameAZ ELECTRONIC MAT LUXEMBOURG SARL·Filed 2016·Granted Dec 29, 2020·0 cites·23 claims
- 0437US2021263414A1A photoresist composition, a method for manufacturing a photoresist coating, etched photoresist coating, and etched si containing layer(s), and manufacturing a device using thereofMERCK PATENT GMBH·Filed 2019·Application pending·0 cites
- 0531US11221558B2Bottom antireflective coating forming compositionAZ ELECTRONIC MAT LUXEMBOURG SARL·Filed 2017·Granted Jan 11, 2022·0 cites·17 claims
- 0631US11163233B2Chemically amplified positive type photoresist composition and pattern forming method using the sameMERCK PATENT GMBH·Filed 2018·Granted Nov 2, 2021·0 cites·16 claims
- 0731US11029599B2Chemically amplified positive photoresist composition and pattern forming method using sameRIDGEFIELD ACQUISITION·Filed 2017·Granted Jun 8, 2021·0 cites·9 claims
- 0831US2004043322A1Photosensitive resin compositionFiled 2002·Application pending·0 cites
- 0931US2005079436A1Photosensitve resin compositionFiled 2003·Application pending·0 cites
- 1026US2003003388A1Photosensitive resin compositionFiled 2001·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Shunji Kawato files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →