Inventor · disambiguated record
Erheng Wang
Also filed as: WANG ERHENG
5 granted patents·4 pending applications·0 citations·filing 2019–2025
64Inventor score
Files withASML NETHERLANDS BV9
Top patents by PatentIndex Score
9 records- 0186US2025336696A1Particle beam inspection apparatusASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 0284US12354891B2Particle beam inspection apparatusASML NETHERLANDS BV·Filed 2024·Granted Jul 8, 2025·0 cites·20 claims
- 0377US11942340B2Particle beam inspection apparatusASML NETHERLANDS BV·Filed 2022·Granted Mar 26, 2024·0 cites·15 claims
- 0476US12249480B2Fluid transfer system in a charged particle systemASML NETHERLANDS BV·Filed 2024·Granted Mar 11, 2025·0 cites·15 claims
- 0563US11996262B2Fluid transfer system in a charged particle systemASML NETHERLANDS BV·Filed 2021·Granted May 28, 2024·0 cites·14 claims
- 0663US11430678B2Particle beam inspection apparatusASML NETHERLANDS BV·Filed 2019·Granted Aug 30, 2022·0 cites·15 claims
- 0747US2025012855A1Systems and structures for venting and flow conditioning operations in inspection systemsASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0844US2023332669A1Vacuum system for mitigating damage due to a vacuum pump malfunctionASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 0943US2024014053A1Charged-particle inspection apparatusASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →