Inventor · disambiguated record
Thomas Scherübl
Also filed as: SCHERUBL THOMAS · SCHERUEBL THOMAS · SCHERÜBL THOMAS
5 granted patents·1 pending application·67 citations·filing 2001–2015
77Inventor score
Top patents by PatentIndex Score
6 records- 0187US6429897B2Confocal microscope with a motorized scanning tableZEISS STIFTUNG·Filed 2001·Granted Aug 6, 2002·47 cites·42 claims
- 0284US8913120B2Method for emulation of a photolithographic process and mask inspection microscope for performing the methodPOORTINGA ERIC·Filed 2010·Granted Dec 16, 2014·16 cites·55 claims
- 0369US10055833B2Method and system for EUV mask blank buried defect analysisZEISS CARL SMT GMBH·Filed 2015·Granted Aug 21, 2018·2 cites·24 claims
- 0466US9431212B2Method for determining the performance of a photolithographic maskWAIBLINGER MARKUS·Filed 2011·Granted Aug 30, 2016·2 cites·21 claims
- 0536US2007070502A1Illuminating and imaging system comprising a diffractive beam splitterBRUNNER ROBERT·Filed 2004·Application pending·0 cites
- 0633US8515154B2Verification method for repairs on photolithography masksSCHERUEBL THOMAS·Filed 2010·Granted Aug 20, 2013·0 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Thomas Scherübl files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →