Inventor · disambiguated record
Takanobu Asano
Also filed as: ASANO TAKANOBU
18 granted patents·2 pending applications·1,552 citations·filing 1988–2007
96Inventor score
Top patents by PatentIndex Score
20 records- 0197US5562383ATreatment apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Oct 8, 1996·572 cites·14 claims
- 0292US5829939ATreatment apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Nov 3, 1998·139 cites·2 claims
- 0387US5261935AClean air apparatusTEL SAGAMI LTD·Filed 1993·Granted Nov 16, 1993·112 cites·11 claims
- 0487US5125784AWafers transfer deviceTEL SAGAMI LTD·Filed 1991·Granted Jun 30, 1992·116 cites·6 claims
- 0586US5055036AMethod of loading and unloading wafer boatTEL SAGAMI LTD·Filed 1991·Granted Oct 8, 1991·111 cites·7 claims
- 0686US5007788APitch changing device for changing pitches of plate-like objects and method of changing pitchesTEL SAGAMI LTD·Filed 1989·Granted Apr 16, 1991·74 cites·6 claims
- 0785US6540509B2Heat treatment system and methodTOKYO ELECTRON LTD·Filed 2001·Granted Apr 1, 2003·31 cites·12 claims
- 0883US5183378AWafer counter having device for aligning wafersTEL SAGAMI LTD·Filed 1991·Granted Feb 2, 1993·85 cites·9 claims
- 0981US6863732B2Heat treatment system and methodTOKYO ELECTRON LTD·Filed 2003·Granted Mar 8, 2005·24 cites·12 claims
- 1081US5110248AVertical heat-treatment apparatus having a wafer transfer mechanismTEL SAGAMI LTD·Filed 1990·Granted May 5, 1992·90 cites·12 claims
- 1174US5030057ASemiconductor wafer transferring method and apparatus and boat for thermal treatment of a semiconductor waferTEL SAGAMI LTD·Filed 1988·Granted Jul 9, 1991·41 cites·7 claims
- 1272US5533243ANotch position aligning apparatus and process for using the apparatus to independently align individual wafers in a wafer cassetteTOKYO ELECTRON LTD·Filed 1994·Granted Jul 9, 1996·51 cites·9 claims
- 1370US7207123B2Dry air-supplying apparatus and treating apparatusNICHIAS CORP·Filed 2003·Granted Apr 24, 2007·15 cites·15 claims
- 1464US5131799ASemiconductor wafer transferring apparatus and boat for thermal treatment of a semiconductor waferTEL SAGAMI LTD·Filed 1990·Granted Jul 21, 1992·32 cites·7 claims
- 1563US5236181AVertical heat treating apparatusTEL SAGAMI LTD·Filed 1991·Granted Aug 17, 1993·15 cites·23 claims
- 1656US5423503APlate-like member conveying apparatusTEL SAGAMI LTD·Filed 1993·Granted Jun 13, 1995·24 cites·32 claims
- 1754US4938655AWafer transfer methodTEL SAGAMI LTD·Filed 1989·Granted Jul 3, 1990·20 cites·7 claims
- 1846US2007048145A1Vacuum evacuation device and method, and substrate processing apparatus and methodISHII KATSUTOSHI·Filed 2006·Application pending·0 cites
- 1941US8387559B2Semiconductor manufacturing plantHIRAIWA JIRO·Filed 2007·Granted Mar 5, 2013·0 cites·13 claims
- 2039US2005121142A1Thermal processing apparatus and a thermal processing methodFiled 2004·Application pending·0 cites
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