Inventor · disambiguated record
William A. Muth
Also filed as: MUTH WILLIAM · MUTH WILLIAM A
8 granted patents·578 citations·filing 1995–2009
89Inventor score
Top patents by PatentIndex Score
8 records- 0197US5757507AMethod of measuring bias and edge overlay error for sub-0.5 micron ground rulesIBM·Filed 1995·Granted May 26, 1998·263 cites·40 claims
- 0296US5712707AEdge overlay measurement target for sub-0.5 micron ground rulesIBM·Filed 1995·Granted Jan 27, 1998·218 cites·33 claims
- 0392US6638671B2Combined layer-to-layer and within-layer overlay control systemIBM·Filed 2001·Granted Oct 28, 2003·55 cites·20 claims
- 0483US7957826B2Methods for normalizing error in photolithographic processesIBM·Filed 2007·Granted Jun 7, 2011·9 cites·4 claims
- 0574US6975398B2Method for determining semiconductor overlay on groundrule devicesIBM·Filed 2001·Granted Dec 13, 2005·19 cites·20 claims
- 0671US7962302B2Predicting wafer failure using learned probabilityIBM·Filed 2008·Granted Jun 14, 2011·5 cites·20 claims
- 0765US8514374B2Alignment method for semiconductor processingBAILEY TODD C·Filed 2009·Granted Aug 20, 2013·2 cites·4 claims
- 0863US7879515B2Method to control semiconductor device overlay using post etch image metrologyIBM·Filed 2008·Granted Feb 1, 2011·7 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →