Inventor · disambiguated record
Shunzo Imai
Also filed as: IMAI SHUNZO
8 granted patents·1,129 citations·filing 1985–1999
91Inventor score
Files withCANON KK8
Top patents by PatentIndex Score
8 records- 0198US4789294AWafer handling apparatus and methodCANON KK·Filed 1986·Granted Dec 6, 1988·593 cites·9 claims
- 0297US5153773AIllumination device including amplitude-division and beam movementsCANON KK·Filed 1990·Granted Oct 6, 1992·214 cites·23 claims
- 0396US5463497AIllumination device including an optical integrator defining a plurality of secondary light sources and related methodCANON KK·Filed 1994·Granted Oct 31, 1995·166 cites·38 claims
- 0477US6304005B1Power supply apparatus and method, and fabrication apparatusCANON KK·Filed 1999·Granted Oct 16, 2001·50 cites·30 claims
- 0576US4758127AOriginal feeding apparatus and a cassette for containing the originalCANON KK·Filed 1986·Granted Jul 19, 1988·48 cites·9 claims
- 0665US4747608AWafer chuckCANON KK·Filed 1985·Granted May 31, 1988·33 cites·8 claims
- 0759US6456364B1Semiconductor manufacturing apparatus, and device manufacturing methodCANON KK·Filed 1999·Granted Sep 24, 2002·18 cites·25 claims
- 0845US4630922APattern transfer apparatusCANON KK·Filed 1985·Granted Dec 23, 1986·7 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →