Inventor · disambiguated record
Shihying Lee
Also filed as: LEE SHIHYING
5 granted patents·2 pending applications·161 citations·filing 1999–2004
84Inventor score
Files withEKC TECHNOLOGY INC5
Top patents by PatentIndex Score
7 records- 0182US6417112B1Post etch cleaning composition and process for dual damascene systemEKC TECHNOLOGY INC·Filed 1999·Granted Jul 9, 2002·72 cites·22 claims
- 0280US7135445B2Process for the use of bis-choline and tris-choline in the cleaning of quartz-coated polysilicon and other materialsEKC TECHNOLOGY INC·Filed 2003·Granted Nov 14, 2006·27 cites·27 claims
- 0379US7144848B2Cleaning compositions containing hydroxylamine derivatives and processes using same for residue removalEKC TECHNOLOGY INC·Filed 2003·Granted Dec 5, 2006·34 cites·20 claims
- 0471US7479474B2Reducing oxide loss when using fluoride chemistries to remove post-etch residues in semiconductor processingEKC TECHNOLOGY INC·Filed 2004·Granted Jan 20, 2009·18 cites·27 claims
- 0553US7157415B2Post etch cleaning composition for dual damascene systemEKC TECHNOLOGY INC·Filed 2001·Granted Jan 2, 2007·10 cites·6 claims
- 0636US2004140288A1Wet etch of titanium-tungsten filmFiled 2003·Application pending·0 cites
- 0736US2004038840A1Oxalic acid as a semiaqueous cleaning product for copper and dielectricsFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →