Inventor · disambiguated record
Haruo Tsuchikawa
Also filed as: TSUCHIKAWA HARUO
5 granted patents·56 citations·filing 1982–1989
79Inventor score
Files withFUJITSU LTD5
Top patents by PatentIndex Score
5 records- 0166US4586141AMethod and apparatus for an electron beam exposure systemFUJITSU LTD·Filed 1983·Granted Apr 29, 1986·28 cites·3 claims
- 0246US4968893AScanning electron beam exposure systemFUJITSU LTD·Filed 1989·Granted Nov 6, 1990·6 cites·5 claims
- 0339US4516030AScanning electron beam exposure systemFUJITSU LTD·Filed 1982·Granted May 7, 1985·10 cites·3 claims
- 0438US4585943AElectron beam exposure apparatusFUJITSU LTD·Filed 1983·Granted Apr 29, 1986·9 cites·4 claims
- 0529US4583077ADeflection system in an electron beam exposure deviceFUJITSU LTD·Filed 1983·Granted Apr 15, 1986·3 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →