Inventor · disambiguated record
Kenta Saiki
Also filed as: SAIKI KENTA
4 granted patents·0 citations·filing 2015–2020
51Inventor score
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0147US11639947B2Method of detecting foreign object on stage and detection apparatusTOKYO ELECTRON LTD·Filed 2020·Granted May 2, 2023·0 cites·14 claims
- 0233US10006941B2Position accuracy inspecting method, position accuracy inspecting apparatus, and position inspecting unitTOKYO ELECTRON LTD·Filed 2015·Granted Jun 26, 2018·0 cites·13 claims
- 0331US10074192B2Substrate inspection apparatus and control method thereofTOKYO ELECTRON LTD·Filed 2015·Granted Sep 11, 2018·0 cites·6 claims
- 0430US10310010B2Probe apparatus and probe methodTOKYO ELECTRON LTD·Filed 2015·Granted Jun 4, 2019·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →